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Experimental Characterization of the Electrostatic Levitation Force in MEMS Transducers

J. Vib. Acoust. Aug 2020, 142(4): 041008 (7 pages)
This article has been cited by the following articles in journals that are participating in CrossRef Cited-by Linking.
  • Meysam Daeichin
  • Ronald Miles
  • Shahrzad Towfighian
Nonlinear Dynamics. January 2020, 100(3)
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