Based on previous feasibility study on one degree of freedom (1DOF) pneumatic active control of pneumatic springs, this paper presents procedures and results of a more realistic 3DOF active control of a pneumatic vibration isolation table. The 3DOF motion of the pneumatic table, consisting of heaving, rolling, and pitching, is controlled directly by adjusting air pressure in four pneumatic cylinders in a dynamic manner with pneumatic valves, without any external actuator such as an electromagnet or voice coil. The time delay control, which is a software chosen in this study, together with the hardware, i.e., the pneumatic actuator, is shown to be very powerful in enhancing the performance of vibration isolation for ground excitation as well as in settling time reduction for payload excitation through simulations and measurements on the 3DOF motion control system. New key results found in the experimental approach are that the pneumatic actuator shows a dynamic behavior of a second-order system, instead of a first-order system, which has been used in existing literatures so far, and that just feed-forward control of the pneumatic actuator by the second-order model can compensate for the inherently slow response characteristics of the pneumatic actuator very successfully. Effectiveness of the proposed active pneumatic control technique in the multi-input and multi-output system is shown via singular value decomposition analysis on the transmissibility matrix. Promising future of the proposed control and performance analysis technique is further discussed based on the results in the case of payload excitations as well.

1.
Gordon
,
C. G.
, 1991, “
Generic Criteria for Vibration Sensitive Equipment
,”
Proceedings of the SPIE
, San Jose, CA.
2.
Amick
,
H.
, 1997, “
On Generic Vibration Criteria for Advanced Technology Facilities
,”
J. Inst. Environ. Sci.
,
5
, pp.
35
44
.
3.
Amick
,
H.
,
Gendreau
,
M.
, and
Gordon
,
C. G.
, 2002, “
Facility Vibration Issues for Nanotechnology Research
,”
Proceedings of the Symposium on Nano Device Technology
, Taiwan.
4.
Lee
,
J. -H.
, and
Kim
,
K. -J.
, 2007, “
Modeling of Nonlinear Complex Stiffness of Dual-Chamber Pneumatic Spring for Precision Vibration Isolations
,”
J. Sound Vib.
0022-460X,
301
, pp.
909
926
.
5.
Lee
,
J. -H.
, and
Kim
,
K. -J.
, 2007, “
Modeling of Dual-Chamber Pneumatic Spring and Application to Transmissibility Design of Vibration Isolation Table
,” Ph.D. thesis, Department of Mechanical Engineering, KAIST, Daejon, South Korea.
6.
Shin
,
Y. H.
, and
Kim
,
K. J.
, 2009, “
Performance Enhancement of Pneumatic Vibration Isolation Tables in Low Frequency Range by Time Delay Control
,”
J. Sound Vib.
0022-460X,
321
, pp.
537
553
.
7.
Makoto
,
O.
,
Yoshiaki
,
I.
,
Noboru
,
S.
,
Kimio
,
U.
, and
Hidetoshi
,
Y.
, 1992, “
Active Control for Precision Vibration Isolation System
,”
Proceedings of the 1st International Conference on Motion and Vibration Control
.
8.
Song
,
J. -H.
,
Kim
,
K. -Y.
, and
Park
,
Y. -P.
, 1994, “
Active Control of Air-Spring Vibration Isolator
,”
Transactions of Korea Society of Mechanical Engineers (KSME)
1226-7287,
19
(
7
), pp.
1605
1617
.
9.
An
,
S. -H.
,
Yim
,
K. -H.
, and
Rim
,
K. -H.
, 2006, “
Active Control of Vibration Isolation Table Using Air-Spring
,”
Transactions of Korean Society for Noise and Vibration Engineering (KSNVE)
1598-2785,
17
(
7
), pp.
565
571
.
10.
An
,
S. -H.
,
Kim
,
H. -S.
, and
Rim
,
K. -H.
, 2006, “
Optimal Design of Air-Spring and Active Control of Vibration Isolation Table
,”
Proceedings of the KSNVE
, pp.
909
914
.
11.
Shih
,
I. -C.
, and
Wang
,
T. -Y.
, 2002, “
Design and Adaptive Control of a Pneumatic Vibration Isolator
,”
Proceedings of the JSME Motion and Vibration Control
, pp.
111
116
.
12.
Chen
,
P. C.
, and
Shih
,
M. C.
, 2007, “
Modeling and Robust Active Control of a Pneumatic Vibration Isolator
,”
J. Vib. Control
1077-5463,
13
(
11
), pp.
1553
1571
.
13.
Kawashima
,
K.
,
Kato
,
T.
,
Sawamoto
,
K.
, and
Kagawa
,
T.
, 2007, “
Realization of Virtual Sub Chamber on Active Controlled Pneumatic Isolation Table With Pressure Differentiator
,”
Precis. Eng.
0141-6359,
31
, pp.
139
145
.
14.
Kato
,
T.
,
Kawashima
,
K.
,
Sawamoto
,
K.
, and
Kagawa
,
T.
, 2007, “
Active Control of a Pneumatic Isolation Table Using Model Following Control and a Pressure Differentiator
,”
Precis. Eng.
0141-6359,
31
, pp.
269
275
.
15.
Sugahara
,
R.
,
Masuzawa
,
M.
, and
Yamaoka
,
H.
, 2004, “
Performance of an Active Vibration Isolation System
,”
Proceedings of the IWAA, CERN
, Geneva.
16.
Yasuda
,
M.
,
Osaka
,
T.
, and
Ikeda
,
M.
, 1996,
Feedforward Control of a Vibration Isolation System for Disturbance Suppression
,
IEEE
, pp.
1229
1233
.
17.
Meiritz Seiki Co., Ltd.
, “
Meiritz Active Pneumatic Suspension, Product Name: MAPS Series
,” http://www.meiritz.jp/global/active/maps/e-maps.pdfhttp://www.meiritz.jp/global/active/maps/e-maps.pdf.
18.
Technical Manufacturing Corporation (TMC)
, “
Active Vibration Cancellation System, Product Name: TMC Eletro-Damp II
,” http://www.techmfg.com/products/advanced/electrodamp.htmhttp://www.techmfg.com/products/advanced/electrodamp.htm.
20.
Kamal
,
Y. -T.
, and
Ito
,
O.
, 1990, “
A Time Delay Controller for Systems With Unknown Dynamics
,”
ASME J. Dyn. Syst., Meas., Control
0022-0434,
112
, pp.
133
142
.
21.
Hsia
,
T. C.
, and
Gao
,
L. S.
, 1990,
Robust Manipulator Control Using Decentralized Linear Time-Invariant Time-Delayed Joint Controllers
,
IEEE
, pp.
2070
2075
.
22.
Chang
,
P. H.
,
Lee
,
J. W.
, and
Park
,
S. H.
, 1997, “
Time Delay Observer: Robust Observer for Nonlinear Plants
,”
ASME J. Dyn. Syst., Meas., Control
0022-0434,
119
, pp.
521
527
.
23.
2004,
Solutions for Control: Catalog 2005
.
dSPACE Inc.
,
Germany
.
24.
Zhu
,
W. -H.
, and
Tryggvason
,
B.
, 2004, “
On Active Acceleration Control of Vibration Isolation System
,”
Proceedings of the 43rd IEEE Conference on Decision and Control
.
25.
2006,
Signal Processing Block-Set 6: User’s Guide
,
The MathWorks, Inc.
,
Natick, MA
.
26.
Bendat
,
J. S.
, and
Piersol
,
A. G.
, 2000,
Random Data
,
3rd ed.
,
Wiley
,
New York
.
27.
Swanson
,
D. A.
,
Miller
,
L. R.
, and
Norris
,
M. A.
, 1994, “
Multidimensional Mount Effectiveness for Vibration Isolation
,”
J. Aircr.
0021-8669,
31
(
1
), pp.
188
196
.
You do not currently have access to this content.