A detailed study of the transient nonlinear dynamics of an electrically actuated micron scale beam is presented. A model developed using the Galerkin procedure with normal modes as a basis accounts for the distributed nonlinear electrostatic forces, nonlinear squeezed film damping, and rotational inertia of a mass carried by the beam. Special attention is paid to the dynamics of the beam near instability points. Results generated by the model and confirmed experimentally show that nonlinear damping leads to shrinkage of the spatial region where stable motion is realizable. The voltage that causes dynamic instability, in turn, approaches the static pull-in value.
Pull-in Dynamics of an Elastic Beam Actuated by Continuously Distributed Electrostatic Force
Contributed by the Technical Committee on Vibration and Sound for publication in the Special Section on MEMS in the JOURNAL OF VIBRATION AND ACOUSTICS. Manuscript received February 2003; revised September 2003. Associate Editor: K. Grosh.
- Views Icon Views
- Share Icon Share
- Cite Icon Cite
- Search Site
Krylov, S., and Maimon, R. (July 30, 2004). "Pull-in Dynamics of an Elastic Beam Actuated by Continuously Distributed Electrostatic Force ." ASME. J. Vib. Acoust. July 2004; 126(3): 332–342. https://doi.org/10.1115/1.1760559
Download citation file:
- Ris (Zotero)
- Reference Manager