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Keywords: sputtered coatingsClose
Journal: Journal of Tribology
Article Type: Technical Papers
J. Tribol. July 2001, 123(3): 641–650.
Published Online: October 31, 2000
... films deposited at different substrate bias voltages carbon films nanotechnology mechanical properties atomic force microscopy hardness sputtered coatings amorphous state wear resistance corrosion resistance 1 Schematic of the surface...