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Keywords: semiconductor technology
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Journal Articles
Article Type: Technical Briefs
J. Tribol. April 2007, 129(2): 436–437.
Published Online: November 13, 2006
... of Polymers , Cambridge University Press , England. chemical mechanical polishing bonds (chemical) planarisation semiconductor technology If the removal of the wafer surface materials is at the molecular scale, this removal is likely carried out by the slurry particles that are...
Journal Articles
Article Type: Technical Papers
J. Tribol. January 2005, 127(1): 190–197.
Published Online: February 7, 2005
... slurries semiconductor technology integrated circuit technology 1 Schematic diagram of CMP platform 2 Schematic view of real contact area between polishing interfaces 3 Schematic view of abrasive particles trapped at the top of the polishing pad asperities 4...