1-12 of 12
Microelectromechanical systems
Close
Save search
Follow your search
Access your saved searches in your account
Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Journal Articles

Modeling of a Thermal-Electrical-Mechanical Coupled Field Contact

R. P. Hennessy, N. E. McGruer, G. G. Adams
Journal: Journal of Tribology
Publisher: ASME
Article Type: Contact Mechanics
J. Tribol. October 2012, 134(4): 041402.
https://doi.org/10.1115/1.4007270
Published Online: September 4, 2012
View Article titled, Modeling of a Thermal-Electrical-Mechanical Coupled Field Contact
Open the PDF for Modeling of a Thermal-Electrical-Mechanical Coupled Field Contact in another window
Topics: Contact resistance, Displacement, Elastic half space, Electric current, Electric potential, Finite element methods, Finite element model, Microelectromechanical systems, Modeling, Switches
Journal Articles

Lubrication of Microelectromechanical Devices Using Liquids of Different Viscosities

I. S. Y. Ku, T. Reddyhoff, R. Wayte, J. H. Choo, A. S. Holmes, H. A. Spikes
Journal: Journal of Tribology
Publisher: ASME
Article Type: Micro-Nano Tribology
J. Tribol. January 2012, 134(1): 012002.
https://doi.org/10.1115/1.4005819
Published Online: March 6, 2012
View Article titled, Lubrication of Microelectromechanical Devices Using Liquids of Different Viscosities
Open the PDF for Lubrication of Microelectromechanical Devices Using Liquids of Different Viscosities in another window
Topics: Film thickness, Friction, Lubricants, Lubrication, Microelectromechanical systems, Stress, Tribometers, Viscosity, Disks, Silicon
Journal Articles

On Squeeze Film Damping in Microsystems

Victor Marrero, Diana-Andra Borca-Tasciuc, John Tichy
Journal: Journal of Tribology
Publisher: ASME
Article Type: Research Papers
J. Tribol. July 2010, 132(3): 031701.
https://doi.org/10.1115/1.4001620
Published Online: June 4, 2010
View Article titled, On Squeeze Film Damping in Microsystems
Open the PDF for On Squeeze Film Damping in Microsystems in another window
Topics: Damping, Lubrication, Lubrication theory, Microelectromechanical systems, Reynolds number, Fluids, Inertia (Mechanics), Computational fluid dynamics
Journal Articles

Linear Stability Analysis of the Herringbone Groove Journal Bearings in Microsystems: Consideration of Gas Rarefaction Effects

Wang-Long Li, Rui-Wen Shen
Journal: Journal of Tribology
Publisher: ASME
Article Type: Research Papers
J. Tribol. October 2009, 131(4): 041705.
https://doi.org/10.1115/1.3201872
Published Online: September 23, 2009
View Article titled, Linear Stability Analysis of the Herringbone Groove Journal Bearings in Microsystems: Consideration of Gas Rarefaction Effects
Open the PDF for Linear Stability Analysis of the Herringbone Groove Journal Bearings in Microsystems: Consideration of Gas Rarefaction Effects in another window
Topics: Bearings, Journal bearings, Microelectromechanical systems, Rotors, Stability, Flow (Dynamics), Knudsen number, Pressure, Damping, Film thickness
Journal Articles

High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine

C. J. Teo, L. X. Liu, H. Q. Li, L. C. Ho, S. A. Jacobson, F. F. Ehrich, A. H. Epstein, Z. S. Spakovszky
Journal: Journal of Tribology
Publisher: ASME
Article Type: Research Papers
J. Tribol. July 2009, 131(3): 032001.
https://doi.org/10.1115/1.3123343
Published Online: May 27, 2009
View Article titled, High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine
Open the PDF for High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine in another window
Topics: Bearings, Journal bearings, Rotors, Turbines, Gas bearings, Anisotropy, Flow (Dynamics), Microelectromechanical systems, Whirls, Thrust bearings
Journal Articles

A Solution for Lightly Loaded Adhesive Rough Surfaces With Application to MEMS

Clint A. Morrow, Michael R. Lovell
Journal: Journal of Tribology
Publisher: ASME
Article Type: Technical Papers
J. Tribol. January 2005, 127(1): 206–212.
https://doi.org/10.1115/1.1829723
Published Online: February 7, 2005
View Article titled, A Solution for Lightly Loaded Adhesive Rough Surfaces With Application to MEMS
Open the PDF for A Solution for Lightly Loaded Adhesive Rough Surfaces With Application to MEMS in another window
Topics: Adhesives, Microelectromechanical systems, Surface roughness, Fractals, Adhesion, Algorithms, Surface energy
Journal Articles

Adhesion and Pull-Off Forces for Polysilicon MEMS Surfaces Using the Sub-Boundary Lubrication Model

Allison Y. Suh, Andreas A. Polycarpou
Journal: Journal of Tribology
Publisher: ASME
Article Type: Technical Papers
J. Tribol. January 2003, 125(1): 193–199.
https://doi.org/10.1115/1.1506313
Published Online: December 31, 2002
View Article titled, Adhesion and Pull-Off Forces for Polysilicon MEMS Surfaces Using the Sub-Boundary Lubrication Model
Open the PDF for Adhesion and Pull-Off Forces for Polysilicon MEMS Surfaces Using the Sub-Boundary Lubrication Model in another window
Topics: Adhesion, Lubrication, Microelectromechanical systems, Silicon, Surface roughness, Polysilicon, Stress, Adhesives, Intermolecular forces
Journal Articles

Three-Dimensional Elastic-Plastic Fractal Analysis of Surface Adhesion in Microelectromechanical Systems

K. Komvopoulos, W. Yan
Journal: Journal of Tribology
Publisher: ASME
Article Type: Research Papers
J. Tribol. October 1998, 120(4): 808–813.
https://doi.org/10.1115/1.2833783
Published Online: October 1, 1998
View Article titled, Three-Dimensional Elastic-Plastic Fractal Analysis of Surface Adhesion in Microelectromechanical Systems
Open the PDF for Three-Dimensional Elastic-Plastic Fractal Analysis of Surface Adhesion in Microelectromechanical Systems in another window
Topics: Adhesion, Fractals, Microelectromechanical systems, Deformation, Aluminum, Silicon, Contact mechanics, Separation (Technology), Simulation results, Stiction
Journal Articles

Micro-Patterning of Silicon by Frictional Interaction and Chemical Reaction

Dae-Eun Kim, Jae-Joon Yi
Journal: Journal of Tribology
Publisher: ASME
Article Type: Research Papers
J. Tribol. April 1998, 120(2): 353–357.
https://doi.org/10.1115/1.2834434
Published Online: April 1, 1998
View Article titled, Micro-Patterning of Silicon by Frictional Interaction and Chemical Reaction
Open the PDF for Micro-Patterning of Silicon by Frictional Interaction and Chemical Reaction in another window
Topics: Chemical reactions, Silicon, Microelectromechanical systems, Chemical etching, Crystals, Deformation, Manufacturing, Micromachining, Patternmaking, Stress
Journal Articles

A Fractal Analysis of Stiction in Microelectromechanical Systems

K. Komvopoulos, W. Yan
Journal: Journal of Tribology
Publisher: ASME
Article Type: Research Papers
J. Tribol. July 1997, 119(3): 391–400.
https://doi.org/10.1115/1.2833500
Published Online: July 1, 1997
View Article titled, A Fractal Analysis of Stiction in Microelectromechanical Systems
Open the PDF for A Fractal Analysis of Stiction in Microelectromechanical Systems in another window
Topics: Fractals, Microelectromechanical systems, Stiction, Materials properties, Surface roughness, Stiffness, Deformation, Design, Measuring instruments, Micromechanical devices
Journal Articles

Atomic-Scale Friction Measurements Using Friction Force Microscopy: Part I—General Principles and New Measurement Techniques

Ju-Ai Ruan, Bharat Bhushan
Journal: Journal of Tribology
Publisher: ASME
Article Type: Research Papers
J. Tribol. April 1994, 116(2): 378–388.
https://doi.org/10.1115/1.2927240
Published Online: April 1, 1994
View Article titled, Atomic-Scale Friction Measurements Using Friction Force Microscopy: Part I—General Principles and New Measurement Techniques
Open the PDF for Atomic-Scale Friction Measurements Using Friction Force Microscopy: Part I—General Principles and New Measurement Techniques in another window
Topics: Friction, Microscopy, Force measurement, Calibration, Microelectromechanical systems, Atomic force microscopy, Instrumentation, Interface phenomena, Lubrication, Microscale devices
Journal Articles

Tribology of Ion Bombarded Silicon for Micromechanical Applications

B. K. Gupta, Jacques Chevallier, Bharat Bhushan
Journal: Journal of Tribology
Publisher: ASME
Article Type: Research Papers
J. Tribol. July 1993, 115(3): 392–399.
https://doi.org/10.1115/1.2921649
Published Online: July 1, 1993
View Article titled, Tribology of Ion Bombarded Silicon for Micromechanical Applications
Open the PDF for Tribology of Ion Bombarded Silicon for Micromechanical Applications in another window
Topics: Silicon, Tribology, Friction, Wear, Microelectromechanical systems, Deformation, Design, Fracture (Materials), Manufacturing, Microhardness