In this study, the structure and tribological performance of the diamondlike carbon (DLC) films were related to deposition parameters. The feasibility of the microwave-excited plasma-enhanced chemical vapor deposition (μW-PECVD) as a process to produce good quality DLC films was the focus. The DLC films were deposited on the steel substrates with a tungsten carbide interlayer via μW-PECVD. The negative substrate bias used during the film deposition was varied. The Raman results revealed that the increased negative substrate bias increased the sp3 bonding in the DLC films as a result of the increased kinetic energy of film-forming ions during the film deposition. The tribological results clearly indicated that the friction and wear of the DLC-coated steel samples against a 100Cr6 steel ball significantly decreased with increased negative substrate bias due to the significantly improved wear resistance of the DLC films.
Effects of Substrate Bias on Tribological Properties of Diamondlike Carbon Thin Films Deposited Via Microwave-Excited Plasma-Enhanced Chemical Vapor Deposition
Nanyang Technological University,
50 Nanyang Avenue,
Singapore 639798, Singapore
Venlo 5928 LL, The Netherlands
University of Leeds,
Leeds LS2 9JT, UK
Contributed by the Tribology Division of ASME for publication in the JOURNAL OF TRIBOLOGY. Manuscript received August 1, 2015; final manuscript received October 23, 2015; published online February 15, 2016. Assoc. Editor: Dae-Eun Kim.
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Win Khun, N., Neville, A., Kolev, I., and Zhao, H. (February 15, 2016). "Effects of Substrate Bias on Tribological Properties of Diamondlike Carbon Thin Films Deposited Via Microwave-Excited Plasma-Enhanced Chemical Vapor Deposition." ASME. J. Tribol. July 2016; 138(3): 031301. https://doi.org/10.1115/1.4031995
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