This paper presents a finite element approach for modeling a thermal-electrical-mechanical coupled-field contact comprised of an elastic hemisphere pressed against an elastic half-space. The goal of this investigation is to develop a fundamental understanding of the behavior of this multiphysics contact, with a particular interest on the contact area through which current flows. The results from the model illustrate a distinct difference in contact behavior between force control and displacement control in the presence of an applied electrical potential/current. It is shown that, while Hertz contact theory can be used to accurately predict the behavior of the contact under force control, a new relationship is established to accurately predict the behavior of the contact under displacement control.

References

1.
Rebeiz
,
G. M.
, 2003,
RF MEMS: Theory, Design, and Technology
,
Wiley
,
Hoboken, NJ
, Chap. 1.
2.
Thakur
,
S.
,
SumithraDevi
,
K.
, and
Rajput
,
S.
, 2009, “
Low-Loss RF MEMS Fixed Free Capacitive Switch Characterization
,”
Proc. IEEE Applied Electromagnetics Conference (AEMC)
, Kalkuta, IEEE, New York, pp.
1
4
.
3.
Majumder
,
S.
,
McGruer
,
N.
,
Adams
,
G. G.
,
Zavracky
,
P.
,
Morrison
,
R. H.
, and
Krim
,
J.
, 2001, “
Study of Contacts in an Electrostatically Actuated Microswitch
,”
Sens. Actuators, A
,
93
(
1
), pp.
19
26
.
4.
McGruer
,
N.
,
Adams
,
G.
,
Chen
,
L.
,
Guo
,
Z.
, and
Du
,
Y.
, 2006, “
Mechanical, Thermal, and Material Influences on Ohmic-Contact-Type MEMS Switch Operation
,”
Proc. IEEE International Conference on Micro Electro Mechanical Systems
, Istanbul, IEEE, New York, pp.
230
233
.
5.
Adams
,
G. G.
, and
McGruer
,
N. E.
, 2010, “
A Review of Adhesion in an Ohmic Microswitch
,”
J. Adhes. Sci. Technol.
,
15
(
16
), pp.
2571
2595
.
6.
Chen
,
L.
,
Lee
,
H.
,
Guo
,
Z.
,
McGruer
,
N. E.
,
Gilbert
,
K.
,
Mall
,
S.
,
Leedy
,
K.
, and
Adams
,
G.
, 2007, “
Contact Resistance Study of Noble Metals and Alloy Films Using a Scanning Probe Microscope Test Station
,”
J. Appl. Phys.
,
102
(
7
), p.
074910
.
7.
Broue
,
A.
,
Dhennin
,
J.
,
Charvet
,
P.
,
Pons
,
P.
,
Jemaa
,
N. B.
,
Heeb
,
P.
,
Coccetti
,
F.
, and
Plana
,
R.
, 2010, “
Multi-Physical Characterization of Micro-Contact Materials for MEMS Switches
,”
Proc. IEEE Holm Conference on Electrical Contacts (HOLM)
, Charleston, South Carolina, IEEE, New York, pp.
1
10
.
8.
Majumder
,
S.
,
McGruer
,
N.
, and
Adams
,
G. G.
, 2005, “
Adhesion and Contact Resistance in an Electrostatic MEMS Microswitch
,” Proc. STLE/ASME International Joint Tribology Conference, Ponte Vedra Beach, Florida, pp.
215
218
.
9.
Du
,
Y.
,
Chen
,
L.
,
McGruer
,
N. E.
,
Adams
,
G. G.
, and
Etsion
,
I.
, 2007, “
A Finite Element Model of Loading and Unloading of an Asperity Contact With Adhesion and Plasticity
,”
J. Colloid Interface Sci.
,
312
(
2
), pp.
522
528
.
10.
Chen
,
L.
,
McGruer
,
N. E.
,
Adams
,
G. G.
, and
Du
,
Y.
, 2008, “
Separation Modes in Microcontacts Identified by the Rate Dependence of the Pull-Off Force
,”
Appl. Phys. Lett.
,
93
, p.
053503
.
11.
Eid
,
H.
,
Adams
,
G. G.
,
McGruer
,
N. E.
,
Fortini
,
A.
,
Oliveira
,
A. B.
,
Buldyrev
,
S.
, and
Srolovitz
,
D.
, 2009, “
A Multiscale Model of Contact and Adhesion
,” Proc. World Tribology Congress, Kyoto, Japan, p.
376
.
12.
Bottauscio
,
O.
,
Crotti
,
G.
, and
Farina
,
G.
, 1993, “
Numerical Analysis of Heating Transient of Electric Contacts Under Short-Circuit Conditions
,”
IEEE Trans. Compon., Hybrids, and Manuf. Technol.
,
16
(
5
), pp.
563
570
.
13.
Monnier
,
A.
,
Froidurot
,
B.
,
Jarrige
,
C.
,
Teste
,
P.
, and
Meyer
,
R.
, 2007, “
A Mechanical, Electrical, Thermal Coupled-Field Simulation of a Sphere-Plane Electrical Contact
,”
IEEE Trans. Compon. Packag. Technol.
,
30
(
4
), pp.
787
795
.
14.
Holm
,
R.
, and
Holm
,
E.
, 1967,
Electric Contacts: Theory and Application
,
Springer-Verlag
,
New York
, Chaps. 5–13.
15.
Timsit
,
R. S.
, 2010, “
Constriction Resistance of Thin Film Contacts
,”
IEEE Trans. Compon. Packag. Technol.
,
33
(
3
), pp.
636
642
.
16.
Jansen
,
A. G. M.
,
Gelder
,
A. P.
, and
Wyder
,
P.
, 1980, “
Point-Contact Spectroscopy in Metals
,”
J. Phys. C
,
13
, p.
6073
.
17.
Wexler
,
G.
, 1966, “
The Size Effect and the Non-local Boltzmann Transport Equation in Orifice and Disk Geometry
,”
Proc. Phys. Soc.
,
89
, p.
927
.
18.
Barber
,
J.
, 1973, “
Indentation of the Semi-infinite Elastic Solid by a Hot Sphere
,”
Int. J. Mech. Sci.
,
15
(
10
), pp.
813
819
.
19.
Totemeier
,
T. C.
, and
Smithells
,
C. J.
, 2004,
Smithells Metals Reference Book
,
Butterworth-Heinemann
,
Waltham, MA
.
21.
Greenwood
,
J.
, and
Williamson
,
J.
, 1966, “
Contact of Nominally Flat Surfaces
,”
Proc. R. Soc. London
,
295
(
1442
), p.
300
319
.
22.
Omar
,
M. A.
, 1975,
Elementary Solid State Physics: Principles and Applications
,
Addison-Wesley
,
Boston, MA
.
23.
Lee
,
H.
,
Coutu
,
R. A.
,
Mall
,
S.
, and
Leedy
,
K. D.
, 2006, “
Characterization of Metal and Metal Alloy Films as Contact Materials in MEMS Switches
,”
J. Micromech. Microeng.
,
16
, p.
557
.
24.
Lamb
,
H.
, 1883, “
On Electrical Motions in a Spherical Conductor
,”
Philos. Trans. R. Soc. London
,
174
(
224–226
), pp.
519
545
.
25.
Kazimierczuk
,
M. K.
, 2009,
High-Frequency Magnetic Components
,
Wiley
,
New York
.
26.
Hayt
,
W. H.
, and
Buck
,
J. A.
, 2001,
Engineering Electromagnetics
,
McGraw-Hill
,
Boston, MA
.
27.
Yan
,
X.
,
McGruer
,
N.
,
Adams
,
G.
, and
Majumder
,
S.
, 2003, “
Finite Element Analysis of the Thermal Characteristics of MEMS Switches
,”
Proc. IEEE International Conference on TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems
,
Boston, IEEE
,
New York
, pp.
412
415
.
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