probes used for atomic force microscope exhibit large adhesion and friction resulting in artifacts of scanned image. In order to reduce adhesion and friction so as to reduce tip related artifacts, liquid lubricant (Z-TETRAOL) and fluorocarbon polymer (Fluorinert) were applied on the probe. A comprehensive investigation of adhesion, friction, and wear of the uncoated/coated tips in both ambient air and various humidity levels as well as the influence of the coatings on the image resolution was performed. Experiments show that the coatings reduce the adhesion and friction of the tip, improve the initial image resolution, and exhibit less deterioration as compared to that of uncoated tip after scanning. The image degradation of an uncoated probe is also compared with that of an uncoated silicon probe. A probe cantilever deflection model was proposed to correlate the influence of the adhesion and friction with the image distortion.
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e-mail: bhushan.2@osu.edu
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October 2006
Research Papers
Surface Modification of AFM Probes for Adhesion/Friction Reduction and Imaging Improvement
Zhenhua Tao,
Zhenhua Tao
Nanotribology Laboratory for Information Storage and MEMS/NEMS,
The Ohio State University
, 650 Ackerman Road, Suite 255, Columbus, OH 43202
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Bharat Bhushan
Bharat Bhushan
Fellow ASME
Nanotribology Laboratory for Information Storage and MEMS/NEMS,
e-mail: bhushan.2@osu.edu
The Ohio State University
, 650 Ackerman Road, Suite 255, Columbus, OH 43202
Search for other works by this author on:
Zhenhua Tao
Nanotribology Laboratory for Information Storage and MEMS/NEMS,
The Ohio State University
, 650 Ackerman Road, Suite 255, Columbus, OH 43202
Bharat Bhushan
Fellow ASME
Nanotribology Laboratory for Information Storage and MEMS/NEMS,
The Ohio State University
, 650 Ackerman Road, Suite 255, Columbus, OH 43202e-mail: bhushan.2@osu.edu
J. Tribol. Oct 2006, 128(4): 865-875 (11 pages)
Published Online: June 2, 2006
Article history
Received:
January 3, 2006
Revised:
June 2, 2006
Citation
Tao, Z., and Bhushan, B. (June 2, 2006). "Surface Modification of AFM Probes for Adhesion/Friction Reduction and Imaging Improvement." ASME. J. Tribol. October 2006; 128(4): 865–875. https://doi.org/10.1115/1.2345411
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