Pressure and shear flow factors (Patir and Cheng, 1978) were used to take into account the roughness of the pad surface in the modeling of the interfacial fluid pressure during chemical mechanical polishing. An attempt was made to explain the physical meaning of the flow factors in this particular application. Additionally, a parametric study was carried out to see the effect on the model after the incorporation of the flow factors. The pressure and shear flow factors were found to have a competing effect on the magnitude of the sub-ambient fluid pressure.
An Analysis of Mixed Lubrication in Chemical Mechanical Polishing
Contributed by the Tribology Division for publication in the ASME JOURNAL OF TRIBOLOGY. Manuscript received by the Tribology Division July 29, 2003; revised manuscript received February 4, 2004. Editor: J. A. Tichy.
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Ng , S. H., Higgs, , C. F., Yoon , I., and Danyluk , S. (April 7, 2005). "An Analysis of Mixed Lubrication in Chemical Mechanical Polishing ." ASME. J. Tribol. April 2005; 127(2): 287–292. https://doi.org/10.1115/1.1760551
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