This paper, the first of two companion papers, reports empirical data on wear properties in carbon nitride coatings by a spherical diamond counter-face in repeated sliding contacts through in situ examination and post-sliding observation, with an emphasis on the effects of friction cycles and normal load. In the repeated sliding, a specific wear amount of about 109mm3/Nm was observed on the wear track of the carbon nitride coating when no wear particles were detected. On the other hand, a specific wear amount of about 106mm3/Nm was observed on the wear track of the carbon nitride coating, where wear particles were generated after a certain number of friction cycles. Wear rate change corresponds to a wear mode change. From in situ examination, the critical number of friction cycles, Nc, for wear particle generation is proven to be related to a wear mode change.

1.
Holmberg
K.
, and
Matthews
,
A.
,
1994
, Coatings Tribology, Dowson, D., eds.,
Tribology Series
,
28
, Elsevier, pp.
125
235
.
2.
Erdemir, A., Switala, M., Wie, R., and Wilbur, P., 1991, Surface and Coatings Technology, 50, pp. 17.
3.
Grill
,
A.
,
1997
, “
Tribology of Diamondlike Carbon and Related Materials: An Updated Review
,”
Surf. Coat. Technol.
,
94/95
, pp.
507
513
.
4.
Donnet
,
C.
,
Mogne
,
T. Le
,
Ponsonnet
,
L.
,
Belin
,
M.
,
Grill
,
A.
,
Patel
,
V.
, and
Jahnes
,
C.
,
1998
, “
The Respective Role of Oxygen and Water Vapor on the Tribology of Hydrogenated Diamond-like Carbon Coatings
,”
Tribol. Lett.
,
4
, pp.
259
265
.
5.
Liu
,
A. Y.
, and
Cohen
,
M. L.
,
1989
, “
Prediction of New Low Compressibility Solid
,”
Science
,
245
, pp.
841
842
.
6.
Liu
,
A. Y.
, and
Cohen
,
M. L.
,
1990
, “
Structural Properties and Electronic Structure of Low Compressibility Materials: β-Si3N4 and Hypothetical β-C3N4,
Phys. Rev. A
,
15
, pp.
10727
10734
.
7.
Chen
,
M. Y.
,
Lin
,
X.
,
Dravid
,
V. P.
,
Chung
,
Y. W.
,
Wong
,
M. S.
, and
Sproul
,
W. D.
,
1993
, “
Synthesis and Tribological Properties of Carbon Nitride as a Novel Superhard Coating and Solid Lubricant
,”
Tribol. Trans.
,
36
, pp.
491
495
.
8.
Li
,
D.
,
Cutiongco
,
E.
,
Chung
,
Y.-W.
,
Wong
,
M. S.
, and
Sproul
,
W. D.
,
1994
, “
Composition, Structure and Tribological Properties of Amorphous Carbon Nitride Coatings
,”
Surf. Coat. Technol.
,
68–69
, pp.
611
615
.
9.
Sjostrom
,
H.
,
Ivanov
,
I.
,
Johansson
,
M.
,
Hultman
,
L.
,
Sundgren
,
J.-E.
,
Hainsworth
,
S. V.
,
Page
,
T. F.
, and
Wallenberg
,
L. R.
,
1994
, “
Reactive Magnetron Sputter Deposition of CNx Films on Si(001) Substrates: Film Growth, Microstructure and Mechanical Properties
,”
Thin Solid Films
,
246
, pp.
103
109
.
10.
Wang
,
X.
,
Martin
,
P. J.
, and
Kinder
,
T. J.
,
1995
, “
Optical and Mechanical Properties of Carbon Nitride Films Prepared by Ion-Assisted Arc Deposition and Magnetron Sputtering
,”
Thin Solid Films
,
256
, pp.
148
154
.
11.
Kola
,
P. V.
,
Cameron
,
D. C.
,
Hashmi
,
M. S. J.
,
Meenan
,
B. J.
,
Pischow
,
K. A.
,
Anderson
,
C. A.
, and
Brown
,
N. M. D.
,
1995
, “
Magnetron-Sputtered Carbon Nitride (CNx) films
,”
Surf. Coat. Technol.
,
74–75
, pp.
696
703
.
12.
Hrdina, J., Jastrabik, L., Fendrich, F., and Sobota, J., 1995, 6th Int. Summer School ‘Modern Plasma Technology’, Mielno’95, 30 May–1 June.
13.
Novikov
,
N.
,
Voronkin
,
M. A.
,
Smekhnor
,
A. A.
,
Zaika
,
N. I.
, and
Zakharchuk
,
A. P.
,
1995
, “
Deposition by Reactive Ion-Plasma Sputtering and Characterization of C-N thin Films
,”
Diamond Relat. Mater.
,
4
, pp.
390
393
.
14.
Veprek
,
S.
,
Weidmann
,
J.
, and
Glatz
,
F.
,
1995
, “
Plasma Chemical Vapor Deposition and Properties of Hard C3N4 Thin Films
,”
J. Vac. Sci. Technol. A
,
A13
, pp.
2914
2919
.
15.
Ogata
,
K.
,
Chubaci
,
J. F. D.
, and
Fujimoto
,
F.
,
1994
, “
Properties of Carbon Nitride Films with Composition Ratio C/N=0.5-3.0 Prepared by the Ion and Vapor Deposition Method
,”
J. Appl. Phys.
,
76
, pp.
3791
3796
.
16.
Suzuki, S., Matsuura, T., Uchizawa, M., Yura, S., and Shibata, H., 1991, “Friction and Wear Studies on Lubricants and Materials Applicable to MEMS,” Proc. IEEE Micro Electro Mechanical Systems, Nara, Japan, 30 January– 2 February, pp. 143–147.
17.
Den, K., and Ko, W. H., 1992, “Application of Diamond-like Carbon Film for Microdynamic Devices,” Proc. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, 22–25 June, pp. 98–101.
18.
Houston
,
M. R.
,
Howe
,
R. T.
,
Komvopoulos
,
K.
, and
Maboudian
,
R.
,
1995
, “
Diamond-Like Carbon Films for Silicon Passivation in Microelectromechanical Devices
,”
Mater. Res. Soc. Symp. Proc.
,
383
, pp.
391
402
.
19.
Tsumaki
,
N.
,
2000
, “
Semiconductor Manufacturing Equipment
,”
Journal of Japanese Society of Tribologists
,
45
, pp.
932
935
.
20.
Prioli
,
R.
,
Zanette
,
S. I.
,
Caride
,
A. O.
,
Franceschini
,
D. F.
, and
Freire
,
F. L.
Jr.
,
1996
, “
Atomic Force Microscopy of Amorphous Hydrogenated Carbon-nitrogen Film Deposited by Radio-frequency-plasma Decomposition of Methane-Ammonia Gas Mixtures
,”
J. Vac. Sci. Technol. A
,
A14
, pp.
2351
2355
.
21.
Koskinen
,
J.
,
Hirvonen
,
J. P.
,
Levoska
,
J.
, and
Torri
,
P.
,
1996
, “
Tribological Characterization of Carbon-Nitrogen Coatings Deposited by Using Vacuum Arc Discharge
,”
Diamond Relat. Mater.
,
5
, pp.
669
673
.
22.
Cutiongco
,
E. C.
,
Li
,
D.
,
Chung
,
Y. W.
, and
Bhatia
,
C. S.
,
1996
, “
Tribological Behavior of Amorphous Carbon Nitride Overcoats for Magnetic Thin-Film Rigid Disks
,”
ASME J. Tribol.
,
118
, pp.
543
548
.
23.
Hajek
,
V.
,
Rusnak
,
K.
,
Vlcek
,
J.
,
Martinu
,
L.
, and
Hawthorne
,
H. M.
,
1997
, “
Tribological Study of CNx Films Prepared by Reactive d.c. Magnetron Sputtering
,”
Wear
,
213
, pp.
80
89
.
24.
Wang
,
D. F.
, and
Kato
,
K.
,
1998
, “
Friction Studies of Ion Beam Assisted Carbon Nitride Coating Sliding Against Diamond Pin in Water Vapor
,”
Wear
,
217
, pp.
307
311
.
25.
Wang
,
D. F.
,
Kato
,
K.
, and
Umehara
,
N.
,
2000
, “
Mechanical Characterization and Tribological Evaluation of Ion-Beam-Assisted Sputter Coatings of Carbon With Nitrogen Incorporation
,”
Surf. Coat. Technol.
,
123
, pp.
177
184
.
26.
Khurshudov
,
A.
,
Kato
,
K.
, and
Koide
,
H.
,
1997
, “
Wear of the AFM Diamond Tip Sliding Against Silicon
,”
Wear
,
203–204
, pp.
22
27
.
27.
Sundararajan
,
S.
, and
Bhushan
,
B.
,
1999
, “
Micro/Nanotribology of Ultra-Thin Amorphous Carbon Coatings Using Atomic Force/Friction Force Microscopy
,”
Wear
,
225–229
, pp.
678
689
.
28.
Stachowiak, G. W., 1997, “Numerical Characterization of Wear Particle Morphology and Angularity of Particles and Surfaces,” New Directions in Tribology, Hutchings, I. M., eds., MEP Publications Ltd., pp. 371–389.
29.
Stachowiak, G. W., 1998, “Particle Angularity and Its Relationship to Abrasive and Erosive Wear,” Proc. 5th International Tribology Conference in Australia (AUSTRIB’98-Tribology at Work), Hargreaves, D. J., and Scott, W., eds., pp. 465–470.
30.
Wang
,
D. F.
, and
Kato
,
K.
,
2002
, “
In-Situ Examination of Wear Particle Generation in Carbon Nitride Coatings by Repeated Sliding Contact against a Spherical Diamond
,”
Wear
,
253
, pp.
519
526
.
31.
Gabriel
,
K. J.
,
Behi
,
F.
,
Mahadevan
,
R.
, and
Mehregany
,
M.
,
1990
, “
In Situ Friction and Wear Measurements in Integrated Poly-Silicon Mechanisms
,”
Sens. Actuators
,
A21–A23
, pp.
184
188
.
You do not currently have access to this content.