This paper describes the floating characteristics of squeeze-film gas bearings with a vibration absorber. This bearing uses a piezoelectric actuator directly attached to a counterweight to impart oscillations to a bearing surface and, therefore, can generate a squeeze-film between the bearing and the guideway surfaces. Furthermore, in this squeeze bearing, a vibration absorber is inserted between a counterweight and a carried object to reduce the vibrational amplitude of the carried object and improve the motion accuracy. The effects of the vibration absorber on the floating characteristics are discussed theoretically and experimentally. It was found that the material of the vibration absorber greatly affected the floating characteristics, and the absorber made of silicone rubber was very effective to reduce the vibrational amplitude of the carried object.

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