The micro-EHD effects caused by wavy surfaces have been analytically investigated. The investigation includes the effects of phase, wavelength, and wave amplitude on film thickness, pressure distribution and subsurface octahedral shear stress field. The presence of a wavy surface with a given wavelength produces pressure oscillations of the same wavelength. With increasing wave amplitude and decreasing wavelength, the micro-EHD action increases. This results in a maximum value of the octahedral shear stress which is greater in magnitude and closer to the surface than the corresponding smooth surface case. The slope of the wavy surface in the inlet region determines whether the average film thickness is smaller or larger than the smooth surface value.

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