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Journal Articles
Error Budget of Wafer Bonding Alignment System Based on Vision
Available to Purchase
Publisher: ASME
Article Type: Technical Briefs
J. Micro Nano-Manuf. June 2023, 11(2): 024503.
Paper No: JMNM-23-1057
Published Online: May 8, 2024
Proceedings Papers
Error Budget of Wafer Bonding Alignment System Based on Machine Vision
Available to Purchase
Proc. ASME. IMECE2023, Volume 3: Advanced Manufacturing, V003T03A090, October 29–November 2, 2023
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2023-112938
Proceedings Papers
A Hybrid Time-Varying Integrator-Gain Control Strategy for an Ultra-Precision Wafer Stage
Available to Purchase
Proc. ASME. IMECE2023, Volume 6: Dynamics, Vibration, and Control, V006T07A005, October 29–November 2, 2023
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2023-111839
Topics:
Semiconductor wafers
Proceedings Papers
Less Conservative Stability Constraint for Data-Based Feedback Tuning
Available to Purchase
Proc. ASME. IMECE2020, Volume 7A: Dynamics, Vibration, and Control, V07AT07A002, November 16–19, 2020
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2020-23370
Proceedings Papers
Edge Coil Force Fitting and Current Optimal Commutation Algorithm for Magnetic Levitation Planar Motor With Moving Magnet
Available to Purchase
Proc. ASME. IMECE2020, Volume 7A: Dynamics, Vibration, and Control, V07AT07A040, November 16–19, 2020
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2020-23534
Proceedings Papers
The Condition of Dynamic Stability for Self-Paced Treadmill Walking Based on Inverted Pendulum Model
Available to Purchase
Proc. ASME. IMECE2020, Volume 5: Biomedical and Biotechnology, V005T05A039, November 16–19, 2020
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2020-23461
Journal Articles
Local Dynamic Stability of Self-Paced Treadmill Walking Versus Fixed-Speed Treadmill Walking
Available to Purchase
Journal:
Journal of Biomechanical Engineering
Publisher: ASME
Article Type: Technical Briefs
J Biomech Eng. April 2020, 142(4): 044502.
Paper No: BIO-19-1206
Published Online: February 18, 2020
Proceedings Papers
Data-Driven Feedforward Tuning Approach for LPV Motion Systems
Available to Purchase
Proc. ASME. IMECE2019, Volume 4: Dynamics, Vibration, and Control, V004T05A002, November 11–14, 2019
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2019-11203
Proceedings Papers
Convolutional Neural Network-Based Intention Forecasting and Lane Change Path Predicting of the Human Driver
Available to Purchase
Proc. ASME. IDETC-CIE2019, Volume 3: 21st International Conference on Advanced Vehicle Technologies; 16th International Conference on Design Education, V003T01A013, August 18–21, 2019
Publisher: American Society of Mechanical Engineers
Paper No: DETC2019-97521
Journal Articles
Feedback Game-Based Shared Control Scheme Design for Emergency Collision Avoidance: A Fuzzy-Linear Quadratic Regulator Approach
Available to Purchase
Publisher: ASME
Article Type: Research-Article
J. Dyn. Sys., Meas., Control. August 2019, 141(8): 081005.
Paper No: DS-17-1640
Published Online: March 25, 2019
Proceedings Papers
Dynamic Exposure Model of Scanning Beam Interference Lithography
Available to Purchase
Proc. ASME. IMECE2018, Volume 4A: Dynamics, Vibration, and Control, V04AT06A004, November 9–15, 2018
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2018-86979
Proceedings Papers
A Hybrid FEM-Analytical Force and Torque Model for the Electrodynamic Suspension Reaction Sphere
Available to Purchase
Proc. ASME. IMECE2017, Volume 1: Advances in Aerospace Technology, V001T03A025, November 3–9, 2017
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2017-70864
Proceedings Papers
A Variable-Gain Discrete Sliding Mode Control Strategy With PID-Type Sliding Surface for an Ultra-Precision Wafer Stage
Available to Purchase
Proc. ASME. IMECE2016, Volume 4B: Dynamics, Vibration, and Control, V04BT05A037, November 11–17, 2016
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2016-66324
Proceedings Papers
Closed-Loop Subspace Identification of MIMO Motion System With Flexible Structures for Motion Control
Available to Purchase
Proc. ASME. IMECE2016, Volume 4A: Dynamics, Vibration, and Control, V04AT05A028, November 11–17, 2016
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2016-66430
Proceedings Papers
Frequency Dependent Nonlinear Iterative Learning Control With Application to a Wafer Stage
Available to Purchase
Proc. ASME. IMECE2013, Volume 4A: Dynamics, Vibration and Control, V04AT04A034, November 15–21, 2013
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2013-62054