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Proceedings Papers

The Ferroelectricity and Crystallinity of Zirconia, Hafnia and Hafnium Zirconium Oxide (HZO) Ultrathin Films Prepared by Atomic Layer Deposition With and Without Post-Annealing

Tzu-Yao Hsu, Bo-Ting Lin, Jay Shieh, Miin-Jang Chen
Proc. ASME. SMASIS2018, Volume 1: Development and Characterization of Multifunctional Materials; Modeling, Simulation, and Control of Adaptive Systems; Integrated System Design and Implementation, V001T01A004, September 10–12, 2018
Paper No: SMASIS2018-7946
DOI: https://doi.org/10.1115/SMASIS2018-7946
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Topics: Annealing, Zirconium, Crystallization, Plasmas (Ionized gases), High pressure (Physics), Temperature, Solid solutions, Thermal stresses