Micromachining technology has greatly benefited from the success of developments in implantable biomedical microdevices. In this paper, microelectromechanical systems (MEMS) capacitive pressure sensor operating for biomedical applications in the range of 20–400 mm Hg was designed. Employing the microelectromechanical systems technology, high sensor sensitivities and resolutions have been achieved. Capacitive sensing uses the diaphragm deformation-induced capacitance change. The sensor composed of a rectangular polysilicon diaphragm that deflects due to pressure applied over it. Applied pressure deflects the 2 µm diaphragm changing the capacitance between the polysilicon diaphragm and gold flat electrode deposited on a glass Pyrex substrate. The MEMS capacitive pressure sensor achieves good linearity and large operating pressure range. The static and thermo electromechanical analysis were performed. The finite element analysis data results were generated. The capacitive response of the sensor performed as expected according to the relationship of the spacing of the plates.

References

References
1.
Jiang
,
G.
, 2010, “
Design Challenges of Implantable Pressure Monitoring System
,”
Front. Neurosci.
4
, Article 29.
2.
Daia
,
C.-L.
,
Kaoa
,
P.-H.
,
Taia
,
Y.-W.
,
Wub
,
C.-C.
, 2008, “
Micro FET Pressure Sensor Manufactured Using CMOS-MEMS Technique
,”
Microelectron. J.
,
39
, pp.
744
749.
3.
Schnakenberg
,
U.
,
Kruger
,
C.
,
Pfeffer
,
J.-G.
,
Mokwa
,
W.
,
Bogel
,
G. V.
,
Gunther
,
R.
,
Schmitz-Rode
,
T.
, 2004, “
Intravascular Pressure Monitoring System
,”
Sens. Actuators, A
,
110
, pp.
61
67.
4.
Sansen
et al.
, 1987.
5.
Coosemans and Puers, 2005.
6.
Aarnoudse
,
W.
,
Veer
,
M.
,
Pijls
,
N. H. J.
,
Woorse
,
J.
,
Vercauteren
,
S.
,
Tonino
,
P.
,
Geven
,
M.
,
Rutten
,
M.
,
Hagen
,
E.
,
Bruyne
,
B.
,
Vosse
,
F.
, 2007, “
Direct Volumetric Blood Flow Measurement in Coronary Arteries by Thermodilution
,”
J. Am. Coll. Cardiol.
,
50
, pp.
2294
2304.
7.
Rijks
,
Th. G. S. M.
,
Steeneken
,
P. G.
,
van Beek
,
J. T. M.
,
Ulenaers
,
M. J. E.
,
Jourdain
,
A.
,
Tilmans
,
H. A. C.
,
De Coster
,
J.
, and
Puers
,
R.
, 2006, “
Microelectromechanical Tunable Capacitors for Reconfigurable RF Architectures
,”
J. Micromech. Microeng.
,
16
(
3
), pp.
601
611.
8.
Arshak
,
K. I.
,
Morris
,
D.
,
Arshak
,
A.
,
Korostynska
,
O.
, and
Jafer
,
E.
, 2007, “
Development of a Wireless Pressure Measurement System Using Interdigitated Capacitors
,”
IEEE Sens. J.
,
7
(
1
), pp.
122
129.
9.
Chang
,
S.-P.
, and
Allen
,
M. G.
, 2004, “
Capacitive Pressure Sensors With Stainless Steel Diaphragm and Substrate
,”
J. Micromechan. Microeng.
,
14
(
4
), pp.
612
618.
10.
Chang
,
S.-P.
, and
Allen
,
M. G.
, 2004, “
Demonstration for Integrating Capacitive Pressure Sensors With Read-Out Circuitry on Stainless Steel Substrate
,”
Sens. Actuators, A
,
116(2)
, pp.
195
204.
11.
Huang
,
Q.
, and
Oberle
,
M.
, 1998, “
A 0.5-mW Passive Telemetry IC for Biomedical Applications
,”
IEEE J. Solid-State Circuits
,
33(7)
, pp.
937
946.
12.
Akar
,
T.
,
Akin
, and
Najafi
,
K.
, 2001, “
A Wireless Batch Sealed Absolute Capacitive Pressure Sensor
,”
J. Sens. Actuators
,
95
, pp.
29
38.
13.
Chatzandroulis
,
S.
,
Tsoukalas
,
D.
, and
Neukomm
,
P. A.
, 2000, “
A Miniature Pressure System With a Capacitive Sensor and a Passive Telemetry Link for Use in Implantable Applications
,”
J. Microelectromech. Syst.
,
9
(
1
), pp.
18
23.
14.
Mezghani
,
B.
,
Smaoui
,
S.
,
Masmoudi
,
M.
, and
Dufaza
,
C.
, 2001, “
MEMS Inductor in LC Receivers for the RF Link of Cochlear Implants
,”
The 13th International Conference on Microelectronics
,
Rabat
,
Morocco
.
15.
Du
,
L. Q.
,
Kwon
,
G.
,
Arai
,
F.
,
Fukuda
,
T.
,
Itoigawa
,
K.
, and
Tukahara
,
Y.
, 2003, “
Structure Design of Micro Touch Sensor Array
Sens. Actuators, A
,
107
, pp.
7
13
.
16.
Defaÿ
,
E.
,
Millon
,
C.
,
Malhaire
,
C.
, and
Barbier
,
D.
, 2002, “
PZT Thin Films Integration for the Realisation of a High Sensitivity Pressure Microsensor Based on a Vibrating Membrane
Sens. Actuators, A
,
99
, pp.
64
67.
17.
Chen
,
P.-J.
,
Rodger
,
D. C.
,
Humayun
,
M. S.
, and
Tai
,
Y.-C.
, 2006, “
Unpowered Spiral-Tube Parylene Pressure Sensor for Intraocular Pressure Sensing
,”
Sens. Actuators A
,
127
, pp.
276
282.
18.
Sathyanarayanan
,
S.
,
Vimala Juliet
,
A.
, 2008, “
Design and Simulation of Wireless Passive Pressure Sensor for Monitoring Intraocular Pressure
Proceedings of International Conference on Resource Utilization and Intelligent Systems
, pp.
708
710
.
19.
Sathyanarayanan
,
S.
,
Vimala Juliet
,
A.
, 2007, “
Design of Wireless Pressure Sensor for Monitoring Intraocular Pressure
Proceedings of 2nd ISSS national Conference on MEMS, Microsensors, Smart materials, Structures and Systems
,
C36
, pp.
28
29.
You do not currently have access to this content.