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Keywords: vision
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Journal Articles
Publisher: ASME
Article Type: Technical Briefs
J. Micro Nano-Manuf. June 2023, 11(2): 024503.
Paper No: JMNM-23-1057
Published Online: May 8, 2024
...Rui Wang; Sen Lu; Kaiming Yang; Yu Zhu Accurate wafer alignment is the key to achieving wafer bonding accuracy. High-precision wafer alignment systems typically use vision to locate the aligned Mark on two wafers, and use complex mechanisms to perform multiple composite movements to achieve...