1-1 of 1
Keywords: multi body precision system
Follow your search
Access your saved searches in your account

Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Journal Articles
Publisher: ASME
Article Type: Technical Briefs
J. Micro Nano-Manuf. June 2023, 11(2): 024503.
Paper No: JMNM-23-1057
Published Online: May 8, 2024
... alignment system error budget vision multi body precision system Tsinghua University 10.13039/501100004147 SKLT2020D23 As one of the ways to transcend Moore's law, three-dimensional (3D) stacking technology is a hot research direction of microsystem integration. Wafer bonding is one...