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Keywords: error budget
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Journal Articles
Publisher: ASME
Article Type: Technical Briefs
J. Micro Nano-Manuf. June 2023, 11(2): 024503.
Paper No: JMNM-23-1057
Published Online: May 8, 2024
... functionality, making the coupling effect of multiple types of errors more complex and challenging the error budget of wafer alignment systems. This paper proposes an error budgeting method for such vision based multibody precision systems. This method takes the homogeneous transformation matrix (HTM) method...
Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2021, 9(1): 010901.
Paper No: JMNM-20-1012
Published Online: February 9, 2021
... Cost, DC-Coupled Active Vibration Isolation System ,” Ph.D. thesis, Massachusetts Institute of Technology , Cambridge, MA . e-mail:  [email protected] 18 04 2020 10 12 2020 09 02 2021 metrology X-ray CT radiograph uncertainty analysis error budget signal variation...