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Journal Articles

Fabrication of Three-Dimensional Functional Microstructures on Curved Substrates Using Three-Dimensional Microlens Projection

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Hao Zhang, Lei Li, Sebastian Scheiding, Andreas Gebhardt, Stefan Risse, Ramona Eberhardt, Andreas Tünnermann, Donggang Yao, Allen Y. Yi
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. September 2013, 1(3): 031006.
Paper No: JMNM-12-1080
https://doi.org/10.1115/1.4025060
Published Online: August 13, 2013
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Topics: Manufacturing, Micromachining, Photoresists, Resolution (Optics), Spin (Aerodynamics), Functionally graded materials, Calibration