Abstract

Acoustic radiation force in the near-field of a vibrating source can be utilized to lift and transport objects, which provides a non-contact driving technology in addition to maglev. This paper presents a novel design of a self-levitated planar stage based on near-field acoustic transportation. A closed-loop system is proposed to design a capacitance surface encoder to provide direct two-dimensional position feedback. A dynamic model based on the Reynolds equation is established to study its driving mechanism. A prototype including the levitation stage, encoder, and controller is implemented to demonstrate the potential of arbitrary trajectory tracking in two-dimensional space.

Article PDF first page preview

Article PDF first page preview
This content is only available via PDF.

Article PDF first page preview

Article PDF first page preview
You do not currently have access to this content.