Abstract

The plasma printing was developed as a means to fabricate the micronozzle chip with the inner diameter less than 50 μm. The initial two-dimensional micropattern was printed onto the stainless steel substrate surface by the maskless lithography. These printed micropatterns were utilized as a mask to make selective nitriding into the unprinted surface. After removal of printed pattern, the un-nitrided surfaces were chemically etched to leave the nitrided microtexture as a micronozzle chip. High nitrogen supersaturation as well as selective nitrogen diffusion had influence on the spatial resolution in this plasma printing in addition to the digitizing error in the maskless lithography.

References

References
1.
Khandpur
,
R. S.
,
2005
,
Printed Circuit Boards: Design, Fabrication, Assembly and Testing
,
Tata-McGraw-Hill
,
New Delhi, India
, pp.
373
378
.
2.
Cheng
,
S.
,
Huang
,
C.-M.
, and
Pecht
,
M.
,
2017
, “
A Review of Lead-Free Solders for Electrics Applications
,”
Microelectron. Reliab.
,
75
, pp.
77
95
.10.1016/j.microrel.2017.06.016
3.
Babiarz
,
A. J.
,
2008
, “
Dispensing for the OLED Encapsulation Process
,”
Display Technol.
,
23
(
2
), pp.
1
3
.http://www.amtest.bg/press/asymtek/Dispensing_for_the_OLED_Encapsulation_Process.pdf3
4.
Cardoso
,
P.
, and
Davim
,
J. P.
,
2012
, “
Micro-Milling of Metallic Materials—A Brief Overview
,”
Trans. FAMENA
,
36
(
2
), pp.
79
85
.
5.
Tanveer
,
A.
,
Mujumdar
,
S. S.
, and
Kapoor
,
S. G.
,
2018
, “
Experimental Investigation of Atomized Dielectric-Based Electrical Discharge Machining
,”
Second World Congress on Micro and Nano Manufacturing
, Portoroz, Sloveni, Sept. 18–20, pp.
239
242
.http://rpsonline.com.sg/proceedings/9789811127281/html/75.xml
6.
Nasrollahi
,
V.
,
Penchev
,
P.
,
Dimov
,
S.
, and
Kim
,
K.
,
2018
, “
Effects of Focusing Lenses and Laser Fluence in Drilling High Aspect Ratio Micro Holes
,”
Second World Congress on Micro and Nano Manufacturing
, Portoroz, Slovenia, Sept. 18–20 , pp.
107
110
.
7.
Aizawa
,
T.
,
2017
, “
Micro-Fabrication of Textured Stainless Steels Via the Nitrogen Supersaturation Process
,”
First Engineering Innovation and Technology Conference
, Cebu, Philippine, Nov. 27–29, pp.
17
22
.
8.
Aizawa
,
T.
, and
Sugita
,
Y.
,
2017
, “
Heterogeneous Micro-Structuring of Stainless Steel Tools Via Plasma Printing
,”
First World Congress on Micro and Nano Manufacturing
, Kaosheng, Taiwan, Mar. 27–29, pp.
143
146
.
9.
Aizawa
,
T.
,
2018
, “
Micro-Manufacturing by Controlled Plasma Technologies
,”
Automob. Eng.
,
72
(
6
), pp.
35
41
.
10.
Aizawa
,
T.
, and
Wasa
,
K.
,
2018
, “
Fine Micro-Fabrication of Stainless Steel Nozzle Array by Plasma Printing
,”
Second World Congress on Micro and Nano Manufacturing
, Portoroz, Slovenia, Sept. 18–20, pp.
65
68
. 10.3850/978-981-11-2728-1_07
11.
Kim
,
S. K.
,
Yoo
,
J. S.
,
Priest
,
J. M.
, and
Fewell
,
M. P.
,
2003
, “
Characterization of Martensitic Stainless Steel Nitrided in a Low Pressure RF Plasma
,”
Surf. Coat. Tech.
,
163–164
, pp.
380
385
.10.1016/S0257-8972(02)00631-X
12.
Li
,
C. X.
, and
Bell
,
T.
,
2006
, “
Corrosion Properties of Plasma Nitrided Martensitic Stainless Steel in 3.5% NaCl and 1% HCl Aqueous Solutions
,”
Corros. Sci.
,
48
(
8
), pp.
2036
2049
.10.1016/j.corsci.2005.08.011
13.
Ferreira
,
L. M.
,
Brunatto
,
S. F.
, and
Cardoso
,
R. P.
,
2015
, “
Martensitic Stainless Steels Low-Temperature Nitriding Dependence on Substrate Composition
,”
Mater. Res.
,
18
(
3
), pp.
622
627
.10.1590/1516-1439.015215
14.
Farghali
,
A.
, and
Aizawa
,
T.
,
2017
, “
Phase Transformation Induced by High Nitrogen Content Solid Solution in the Martensitic Stainless Steels
,”
Mater. Trans.
,
58
(
4
), pp.
697
700
.10.2320/matertrans.M2016418
15.
Aizawa
,
T.
, and
Sugita
,
Y.
,
2013
, “
High Density RF-DC Plasma Nitriding of Steels for Die and Mold Technologies
,”
Res. Rep. SIT
,
57
(
1
), pp.
1
10
.
16.
Dong
,
H.
,
2010
, “
S-Phase Surface Engineering of Fe-Cr, Co-Cr and Ni-Cr Alloys
,”
Int. Mater. Rev.
,
55
(
2
), pp.
65
98
.10.1179/095066009X12572530170589
17.
Santojoyo
,
D.
,
Aizawa
,
T.
,
Muraishi
,
S.
, and
Morita
,
H.
,
2014
, “
Micro-Texturing of Stainless Steels Via High Density Plasma Nitriding
,”
Ninth International Conference on Micro Manufacturing
, Singapore, Mar. 25–28, pp.
1
8
.
18.
Farghali
,
A.
, and
Aizawa
,
T.
,
2017
, “
High Nitrogen Concentration on the Fine Grained Austenitic Stainless Steels
,”
12th South East Asian Technical University Consortium (SEATUC) Conference
, 11th SEATUC Conference, Ho Chi Minh City, Vietnam, Mar. 13–14, pp.
1
6
.
19.
Fargahli
,
A.
, and
Aizawa
,
T.
,
2018
, “
Nitrogen Supersaturation Process in the AISI420 Martensitic Stainless Steels by Low Temperature Plasma Nitriding
,”
ISIJ-Int.
,
58
(
3
), pp.
401
407
.10.2355/isijinternational.ISIJINT-2017-451
20.
Katoh
,
T.
,
Aizawa
,
T.
, and
Yamaguchi
,
T.
,
2015
, “
Low Temperature High Density Plasma Nitriding of Stainless Steel Molds for Stamping of Oxide Glasses
,”
Manuf. Rev.
,
2
(
2
), pp.
1
7
.
21.
Herdianto
,
H.
,
Aizawa
,
T.
,
Wasa
,
K.
,
Santojojo
,
D.
, and
Sakti
,
S. P.
,
2017
, “
Precise Complex Micro-Texturing Into Stainless Steels by Plasma Printing
,”
11th South East Asian Technical University Consortium (SEATUC) Conference
, Ho Chi Minh City, Vietnam, Mar. 13–14, pp.
1
8
.
22.
Methe
,
E.
, and
Rie
,
K.-T.
,
1997
, “
Further Investigation of the Structure and Properties of Austenitic Stainless Steel After Plasma Nitriding
,”
Surf. Coat. Technol.
,
116
(
2
), pp.
199
204
.10.1016/S0257-8972(99)00085-7
23.
Hiraoka
,
Y.
, and
Inoue
,
K.
,
2010
, “
Prediction of Nitrogen Distribution in Steels After Plasma Nitriding
,”
J. Denki Seiko
,
81
(
1
), pp.
15
24
.
24.
Aizawa
,
T.
,
2015
, “
Plasma Printing: An Innovation Toward Micro- and Nano-Manufacturing
,”
Third ISAST Conference
, Bali, Indonesia, Oct. 27–28, pp.
7
16
.
25.
Aizawa
,
T.
, and
Yamaguchi
,
T.
,
2015
, “
Plasma Nitriding Assisted Micro-Texturing Into Martensitic Stainless Steel Molds for Injection Molding
,”
Ninth 4M/International Conference on Micro Manufacturing Conference
, Milan, Italy, Mar. 31–Apr. 2, pp.
454
459
.
26.
Aizawa
,
T.
, and
Wasa
,
K.
,
2017
, “
Fine Micro-Texturing Into Stainless Steels Via the Plasma Printing With Chemical Etching
,”
Tenth Asian Micro/Nano Forming Technology Workshop
, Pohang, Korea, Oct. 15–17, pp.
55
60
.
27.
Aizawa
,
T.
,
2019
,
Low Temperature Plasma Nitriding of Austenitic Stainless Steels
,
InTechOpen Book
,
London
, pp.
31
50
.
28.
Aizawa
,
T.
, and
Yoshihara
,
S.-I.
,
2018
, “
Homogeneous and Heterogeneous Micro-Structuring of Austenitic Stainless Steels by the Low Temperature Plasma Nitriding
,”
IOP Conf. Ser.: Mater. Sci. Eng.
,
372
, p.
012049
.10.1088/1757-899X/372/1/012049
29.
Farghali
,
A.
, and
Aizawa
,
T.
,
2019
, “
Homogeneous and Heterogeneous Structuring Processes in the Nitrided Austenitic Stainless Steels Below 673 K
,”
Mater. Sci. Eng. B
, (in press).
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