The micro-ultrasonic machining (USM) is suitable for machining hard and brittle materials. When a micro hole is drilled deeply using micro-USM, machining speed slows down and the breakage of micro tool may occur. To solve this problem, this paper proposes the application the planetary movement of micro tool in high-aspect ratio micro holes drilling by micro-USM. The micro holes of about 92 μm in diameter with an aspect ratio larger than ten have been machined. The processing efficiency has been improved. The influence of planetary movement parameters on processing efficiency has been investigated

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