This paper presents graphene growth on Pt thin films deposited with four different adhesion layers: Ti, Cr, Ta, and Ni. During the graphene growth at 1000 °C using conventional chemical vapor deposition (CVD) method, these adhesion layers diffuse into and alloy with Pt layer resulting in graphene to grown on different alloys. This means that each different adhesion layers induce a different quality and number of layer(s) of graphene grown on the Pt thin film. This paper presents the feasibility of graphene growth on Pt thin films with various adhesion layers and the obstacles needed to overcome in order to enhance graphene transfer from Pt thin films. Therefore, this paper addresses one of the major difficulties of graphene growth and transfer to the implementation of graphene in nano/micro-electromechanical systems (NEMS/MEMS) devices.
Graphene Growth on and Transfer From Platinum Thin Films
Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MICRO- AND NANO-MANUFACTURING. Manuscript received September 27, 2017; final manuscript received November 21, 2017; published online December 26, 2017. Editor: Jian Cao.
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Cho, J. H., and Cullinan, M. (December 26, 2017). "Graphene Growth on and Transfer From Platinum Thin Films." ASME. J. Micro Nano-Manuf. June 2018; 6(2): 024501. https://doi.org/10.1115/1.4038676
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