This paper presents graphene growth on Pt thin films deposited with four different adhesion layers: Ti, Cr, Ta, and Ni. During the graphene growth at 1000 °C using conventional chemical vapor deposition (CVD) method, these adhesion layers diffuse into and alloy with Pt layer resulting in graphene to grown on different alloys. This means that each different adhesion layers induce a different quality and number of layer(s) of graphene grown on the Pt thin film. This paper presents the feasibility of graphene growth on Pt thin films with various adhesion layers and the obstacles needed to overcome in order to enhance graphene transfer from Pt thin films. Therefore, this paper addresses one of the major difficulties of graphene growth and transfer to the implementation of graphene in nano/micro-electromechanical systems (NEMS/MEMS) devices.

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