The microsensors are mainly made with the single crystal silicon which requires expensive equipments and complicated process. Here, the micro-electroforming technology is used to fabricate the microresonant gas sensor. The fabricating process of the microresonant gas sensor is proposed. A microcantilever beam resonator 900 μm long, 300 μm wide, and 10 μm thick is fabricated. The resonant frequency shift is measured when exposed to ethanol vapor. Results show that the shift in the resonant frequency is approximately proportional to the ethanol vapor concentration, and the detection accuracy to ethanol vapor with the sensor is about 1 ppm per Hz frequency shift.
A Microresonant Gas Sensor by Micro-Electroforming
Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MICRO- AND NANO-MANUFACTURING. Manuscript received April 7, 2015; final manuscript received September 28, 2015; published online October 23, 2015. Assoc. Editor: Nicholas Fang.
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Xu, L., and Liu, Y. (October 23, 2015). "A Microresonant Gas Sensor by Micro-Electroforming." ASME. J. Micro Nano-Manuf. March 2016; 4(1): 014501. https://doi.org/10.1115/1.4031740
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