The authors previously developed a new fabrication method for a metal nanodot array, by combination of nanogroove grid patterning and thermal dewetting of metal deposited on a substrate. However, a comprehensive understanding of the thermal dewetting mechanism is necessary to improve the quality and control the variation of the metallic nanodot array. In this study, thermal dewetting-induced nanodot agglomeration mechanism is studied from a theoretical point of view. An analytical model is proposed, based on the total free energy of a dot and substrate system. The theoretical minimum and natural dot sizes show the same trend with an increase of contact angle. The theoretical model is validated by the experimental results.
Theoretical and Experimental Study of Metallic Dot Agglomeration Induced by Thermal Dewetting
Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MICRO- AND NANO-MANUFACTURING. Manuscript received August 14, 2014; final manuscript received January 27, 2015; published online February 23, 2015. Assoc. Editor: Gracious Ngaile.
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Yoshino, M., Li, Z., and Terano, M. (June 1, 2015). "Theoretical and Experimental Study of Metallic Dot Agglomeration Induced by Thermal Dewetting." ASME. J. Micro Nano-Manuf. June 2015; 3(2): 021004. https://doi.org/10.1115/1.4029685
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