In this paper, precise P3 scribing of thin-film solar cells (AZO/CIGS/Mo/Glass) via a picosecond laser is investigated. A parametric study is carried out for P3 scribing to study the effects of laser fluence and overlap ratio on ablation depth and slot quality, supported by the numerical prediction using a two-temperature model. The optimum scribing conditions are determined, and the potential processing speed is increased. Laser induced periodic surface structures are also presented after the scribing process, which can potentially enhance the absorption of the cell surface and consequently increase the cell efficiency.
Issue Section:
Research Papers
References
1.
Dausinger
, F.
, Hügel
, H.
, and Konov
, V.
, 2003
, “Micro-Machining With Ultrashort Laser Pulses: From Basic Understanding to Technical Applications
,” Proc. SPIE
, 5147
, pp. 106
–115
.10.1117/12.5374962.
Hu
, W.
, Shin
, Y. C.
, and King
, G. B.
, 2010
, “Micromachining of Metals, Alloys, and Ceramics by Picosecond Laser Ablation
,” ASME, J. Manuf. Sci. Eng.
, 132
(1
), p. 011009
.10.1115/1.40008363.
Hermann
, J.
, Benfarah
, M.
, Bruneau
, S.
, Axente
, E.
, Coustillier
, G.
, Itina
, T.
, Guillemoles
, J.-F.
, and Alloncle
, P.
, 2006
, “Comparative Investigation of Solar Cell Thin Film Processing Using Nanosecond and Femtosecond Lasers
,” J. Phys. D: Appl. Phys.
, 39
(3
), pp. 453
–460
.10.1088/0022-3727/39/3/0054.
Hermann
, J.
, Benfarah
, M.
, Coustillier
, G.
, Bruneau
, S.
, Axente
, E.
, Guillemoles
, J.-F.
, Sentis
, M.
, Alloncle
, P.
, and Itina
, T.
, 2006
, “Selective Ablation of Thin Films With Short and Ultrashort Laser Pulses
,” Appl. Surf. Sci.
, 252
(13
), pp. 4814
–4818
.10.1016/j.apsusc.2005.06.0575.
Zoppel
, S.
, Huber
, H.
, and Reider
, G. A.
, 2007
, “Selective Ablation of Thin Mo and TCO Films With Femtosecond Laser Pulses for Structuring Thin Film Solar Cells
,” Appl. Phys. A
, 89
(1
), pp. 161
–163
.10.1007/s00339-007-4158-76.
Huber
, H. P.
, Herrnberger
, F.
, Kery
, S.
, and Zoppel
, S.
, 2008
, “Selective Structuring of Thin-Film Solar Cells by Ultrafast Laser Ablation
,” Proc. SPIE
, 6881
, p. 688117
.10.1117/12.7678217.
Račiukaitis
, G.
, and Gečys
, P.
, 2010
, “Picosecond-Laser Structuring of Thin Films for CIGS Solar Cells
,” J. Laser Micro Nanoeng.
, 5
(1
), pp. 10
–15
.10.2961/jlmn.2010.01.00038.
Kim
, T.
, Pahk
, H.
, Park
, H. K.
, Hwang
, D. J.
, and Grigoropoulos
, C. P.
, 2009
, “Comparison of Multilayer Laser Scribing of Thin Film Solar Cells With Femto, Pico and Nanosecond Pulse Durations
,” Proc. SPIE
, 7409
, p. 74090A
.10.1117/12.8264589.
Wehrmann
, A.
, Schulte-Huxel
, H.
, Ehrhardt
, M.
, Ruthe
, D.
, Zimmer
, K.
, Braun
, A.
, and Ragnow
, S.
, 2011
, “Change of Electrical Properties of CIGS Thin-Film Solar Cells After Structuring With Ultrashort Laser Pulses
,” Proc. SPIE
, 7921
, p. 79210T
.10.1117/12.87499910.
Gečys
, P.
, Račiukaitis
, G.
, Gedvilas
, M.
, Braun
, A.
, and Ragnow
, S.
, 2011
, “Scribing of Thin-Film Solar Cells With Picosecond Laser Pulses
,” Phys. Proc.
, 12
, pp. 141
–148
.10.1016/j.phpro.2011.03.11611.
Gečys
, P.
, Račiukaitis
, G.
, Wehrmann
, A.
, Zimmer
, K.
, Braun
, A.
, and Ragnow
, S.
, 2012
, “Scribing of Thin-Film Solar Cells With Picosecond and Femtosecond Lasers
,” J. Laser Micro Nanoeng.
, 7
(1
), pp. 33
–37
.10.2961/jlmn.2012.01.000612.
Burn
, A.
, Romano
, V.
, Muralt
, M.
, Witte
, R.
, Frei
, B.
, Bücheler
, S.
, and Nishiwaki
, S.
, 2012
, “Selective Ablation of Thin Films in Latest Generation CIGS Solar Cells With Picosecond Pulses
,” Proc. SPIE
, 8243
, p. 824318
.10.1117/12.90691913.
Lauzurica
, S.
, García-Ballesteros
, J. J.
, Colina
, M.
, Sánchez-Aniorte
, I.
, and Molpeceres
, C.
, 2011
, “Selective Ablation With UV Lasers of a-Si:H Thin Film Solar Cells in Direct Scribing Configuration
,” Appl. Surf. Sci.
, 257
(12
), pp. 5230
–5236
.10.1016/j.apsusc.2010.09.08814.
Borowiec
, A.
, and Haugen
, H. K.
, 2003
, “Evidence of Surface Plasmon Resonance in Ultrafast Laser-Induced Ripples
,” Appl. Phys. Lett.
82
, pp. 4462
–4464
.10.1063/1.158645715.
Costache
, F.
, Kouteva-Arguirova
, S.
, and Reif
, J.
, 2004
, “Sub-damage-Threshold Femtosecond Laser Ablation From Crystalline Si: Surface Nanostructures and Phase Transformation
,” Appl. Phys. A
, 79
, pp. 1429
–1432
.10.1007/s00339-004-2803-y16.
Bonse
, J.
, Munz
, M.
, and Sturm
, H.
, 2005
, “Structure Formation on the Surface of Indium Phosphide Irradiated by Femtosecond Laser Pulses
,” J. Appl. Phys.
, 97
(1
), p. 013538
.10.1063/1.182791917.
Cheyney
, T
., 2008
, “Thin-Film CIGS Starts to Come of Age
,” Photovoltaic Int.
, 1
, pp. 86
–92
. Available at: http://www.solarmediastore.com/thin-film-cigs-starts-to-come-of-age.html18.
Zhao
, X.
, Cao
, Y.
, Nian
, Q.
, Shin
, Y. C.
, and Cheng
, G.
, 2014
, “Precise Selective Scribing of Thin Film Solar Cells by a Picoseconds Laser
,” Appl. Phys. A
.10.1007/s00339-014-8330-619.
Qiu
, T. Q.
, and Tien
, C. L.
, 1993
, “Heat Transfer Mechanisms During Short-Pulse Laser Heating of Metals
,” ASME J. Heat Transfer
, 115
(4
), pp. 835
–841
.10.1115/1.291137720.
Wu
, B.
, and Shin
, Y. C.
, 2007
, “A Simple Model for High Fluence Ultra-Short Pulsed Laser Metal Ablation
,” Appl. Surf. Sci.
, 247
(8
), pp. 4079
–4084
.10.1016/j.apsusc.2006.09.00721.
Wu
, B.
, and Shin
, Y. C.
, 2009
, “A Simplified Predictive Model for High-Fluence Ultra-Short Pulsed Laser Ablation of Semiconductors and Dielectrics
,” Appl. Surf. Sci.
, 255
(9
), pp. 4996
–5002
.10.1016/j.apsusc.2008.12.05122.
Oka
, N.
, Kimura
, K.
, Yagi
, T.
, Taketoshi
, N.
, Baba
, T.
, and Shigesato
, Y.
, 2012
, “Thermophysical and Electrical Properties of Al-Doped ZnO Films
,” J. Appl. Phys.
, 111
, p. 093701
.10.1063/1.470657223.
Bulgakova
, N. M.
, Stoian
, R.
, Rosenfeld
, A.
, Hertel
, I. V.
, Marine
, W.
, and Campbell
, E. E. B.
, 2005
, “A General Continuum Approach to Describe Fast Electronic Transport in Pulsed Laser Irradiated Materials: The Problem of Coulomb Explosion
,” Appl. Phys. A
, 81
(2
), pp. 345
–356
.10.1007/s00339-005-3242-024.
Mao
, S. S.
, Mao
, X.
, Greif
, R.
, and Russo
, R. E.
, 1998
, “Simulation of Infrared Picosecond Laser-Induced Electron Emission From Semiconductors
,” Appl. Surf. Sci.
, 127
, pp. 206
–211
.10.1016/S0169-4332(97)00633-825.
Van Driel
, H. M.
, 1987
, “Kinetics of High-Density Plasmas Generated in Si by 1.06- and 0.53-μm Picosecond Laser Pulses
,” Phys. Rev. B
, 35
, pp. 8166
–8176
.10.1103/PhysRevB.35.816626.
More
, R. M.
, Warren
, K. H.
, Young
, D. A.
, and Zimmerman
, G. B.
, 1988
, “A New Quotidian Equation of State (QEOS) for Hot Dense Matter
,” Phys. Fluids
31
, pp. 3059
–3078
.10.1063/1.86696327.
Hnatovsky
, C.
, Taylor
, J. R.
, Rajeev
, P. P.
, Simova
, E.
, Bhardwaj
, V. R.
, Rayner
, D. M.
, and Corkum
, P. B.
, 2005
, “Pulse Duration Dependence of Femtosecond-Laser-Fabricated Nanogratings in Fused Silica
,” Appl. Phys. Lett.
, 87
(1
), pp. 14104
–14106
.10.1063/1.199199128.
Rohloff
, M.
, Das
, S. K.
, Horn
, S.
, Grunwald
, R.
, Rosenfeld
, A.
, Kruger
, J.
, and Bonse
, J.
, 2011
, “Formation of Laser-Induced Periodic Surface Structures on Fused Silica Upon Multiple Cross-Polarized Double-Femtosecond-Laser-Pulse Irradiation Sequences
,” J. Appl. Phys.
, 110
(1
), p. 014910
.10.1063/1.360551329.
Vorobyev
, A. Y.
, Makin
, V. S.
, and Guo
, C.
, 2007
, “Periodic Ordering of Random Surface Nanostructures Induced by Femtosecond Laser Pulses on Metals
,” J. Appl. Phys.
, 101
(3
), p. 034903
.10.1063/1.243228830.
Wang
, J.
, and Guo
, C.
, 2005
, “Ultrafast dynamics of Femtosecond Laser-Induced Periodic Surface Pattern Formation on Metals
,” Appl. Phys. Lett.
, 87
(25
), p. 251914
.10.1063/1.214606731.
Vorobyev
, A. Y.
, Makin
, V. S.
, and Guo
, C.
, 2009
, “Brighter Light Sources From Black Metal: Significant Increase in Emission Efficiency of Incandescent Light Sources
,” Phys. Rev. Lett.
, 102
(23
), p. 234301
.10.1103/PhysRevLett.102.23430132.
Vorobyev
, A. Y.
, and Guo
, C.
, 2008
, “Enhanced Absorption of Metals Over Ultrabroad Electromagnetic Spectrum
,” Appl. Phys. Lett.
, 92
(4
), p. 041914
.10.1063/1.283490233.
Yang
, Y.
, Yang
, J.
, Liang
, C.
, and Wang
, H.
, 2008
, “Ultra-Broadband Enhanced Absorption of Metal Surfaces Structured by Femtosecond Laser Pulses
,” Opt. Express
, 16
(15
), pp. 11259
–11265
.10.1364/OE.16.01125934.
Vorobyev
, A. Y.
, and Guo
, C.
, 2005
, “Enhanced Absorptance of Gold Following Multipulse Femtosecond Laser Ablation
,” Phys. Rev. B
, 72
(19
), p. 195422
.10.1103/PhysRevB.72.19542235.
Yuan
, H.
, Yost
, V. E.
, Page
, M. R.
, Stradins
, P.
, Meier
, D. L.
, and Branz
, H. M.
, 2009
, “Efficient Black Silicon Solar Cell With a Density-Graded Nanoporous Surface: Optical Properties, Performance Limitations, and Design Rules
,” Appl. Phys. Lett.
, 95
(12
), p. 123501
.10.1063/1.323143836.
Weck
, A.
, Crawford
, T. H. R.
, Wilkinson
, D. S.
, Haugen
, H. K.
, and Preston
, J. S.
, 2007
, “Ripple Formation During Deep Hole Drilling in Copper With Ultrashort Laser Pulses
,” Appl. Phys. A
, 89
(4
), pp. 1001
–1003
.10.1007/s00339-007-4203-637.
Varlamova
, O.
, Costache
, F.
, Reif
, J.
, and Bestehorn
, M.
, 2006
, “Self-Organized Pattern Formation Upon Femtosecond Laser Ablation by Circularly Polarized Light
,” Appl. Surf. Sci.
, 252
(13
), pp. 4702
–4706
.10.1016/j.apsusc.2005.08.12038.
Zhao
, Q. Z.
, Malzer
, S.
, and Wang
, L. J.
, 2007
, “Formation of Subwavelength Periodic Structures on Tungsten Induced by Ultrashort Laser Pulses
,” Opt. Express
, 32
, pp. 1932
–1934
.10.1364/OL.32.00193239.
Luo
, C. W.
, Tang
, W. T.
, Wang
, H. I.
, Liao
, L. W.
, Lo
, H. P.
, Wu
, K. H.
, Lin
, J-Y.
, Juang
, J. Y.
, Uen
, T. M.
, and Kobayashi
, T.
, 2012
, “Controllable Subwavelength-Ripple and -Dot Structures on YBa2Cu3O7 Induced by Ultrashort Laser Pulses
,” Supercond. Sci. Technol.
, 25
(11
), p. 115008
.10.1088/0953-2048/25/11/11500840.
Theodoropoulou
, S.
, Papadimitriou
, D.
, Anestou
, K.
, Cobet
, Ch.
, and Esser
, N.
, 2009
, “Optical Properties of CuIn1−xGaxSe2 Quaternary Alloys for Solar-Energy Conversion
,” Semicond. Sci. Technol.
24
(1
), p. 015014
.10.1088/0268-1242/24/1/015014Copyright © 2014 by ASME
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