We demonstrate a fast dispersive laser scanning system by using MEMS digital micro-mirror arrays technology. The proposed technique utilizes real-time dispersive imaging system, which captures spectrally encoded images with a single photodetector at pulse repetition rate via space-to-time mapping technology. Wide area scanning capability is introduced by using individually addressable micro-mirror arrays as a beam deflector. Experimentally, we scanned ∼20 mm2 at scan rate of 5 kHz with ∼150 μm lateral and ∼160 μm vertical resolution that can be controlled by using 1024 × 768 mirror arrays. With the current state of art MEMS technology, fast scanning with <30 s and resolution down to single mirror pitch size of 10.8 m is also achievable.
Fast Dispersive Laser Scanner by Using Digital Micro Mirror Arrays
Research Council of Turkey,
Contributed by the Manufacturing Engineering of ASME for publication in the JOURNAL OF MICRO- AND NANO-MANUFACTURING. Manuscript received July 11, 2013; final manuscript received February 26, 2014; published online April 8, 2014. Assoc. Editor: Liwei Lin.
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Kalyoncu, S. K., Torun, R., Huang, Y., Zhao, Q., and Boyraz, O. (April 8, 2014). "Fast Dispersive Laser Scanner by Using Digital Micro Mirror Arrays." ASME. J. Micro Nano-Manuf. June 2014; 2(2): 021004. https://doi.org/10.1115/1.4027127
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