A microcantilever biosensor could be used to convert biology excitations to measurable signals due to its high-sensitivity, low-cost and miniaturized dimension. This technique has been used for monitoring prostate-specific antigen [1], humidity, herbicide [2], metal ion [3], temperature and radiation [4] by applying specific biological recognition element on the cantilever surface.

Sensitivity of microcantilever biosensors relies on biological and structural design. Finite element method (FEM) has been proven to be an efficient tool to characterize the static and dynamic properties of a microcantilever. Yang [5] took advantage of FEM to verify an explicit formula which was used to calculate the fundamental frequency of V-shaped cantilevers. High-order modes of cantilever sensor, which are more sensitive to mass change, have been found to exhibit transverse and longitudinal motion [6]. Goericke and King [7]...

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