Usage of compliant micromechanical oscillators has increased in recent years, due to their reliable performance despite the growing demand for miniaturization. However, ambient vibrations affect the momentum of such oscillators, causing inaccuracy, malfunction, or even failure. Therefore, this paper presents a compliant force-balanced mechanism based on rectilinear motion, enabling usage of prismatic oscillators in translational accelerating environments. The proposed mechanism is based on the opposite motion of two coplanar prismatic joints along noncollinear axes via a shape-optimized linkage system. Rigid-body replacement with shape optimized X-bob, Q-LITF, and LITF joints yielded a harmonic (R > 0.999), low frequency () single piece force-balanced micromechanical oscillator ( 35 mm). The experimental evaluation of large-scale prototypes showed a low ratio of the center of mass (CoM) shift compared to the stroke of the device ( 0.01) and proper decoupling of the mechanism from the base, as the oscillating frequency of the balanced devices during ambient disturbances was unaffected, whereas unbalanced devices had frequency deviations up to 1.6%. Moreover, the balanced device reduced the resultant inertial forces transmitted to the base by 95%.
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April 2017
Research-Article
A Monolithic Force-Balanced Oscillator
Sybren L. Weeke,
Sybren L. Weeke
Department of Precision
and Microsystems Engineering,
Delft University of Technology,
Delft 2628 CD, The Netherlands;
and Microsystems Engineering,
Delft University of Technology,
Delft 2628 CD, The Netherlands;
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Nima Tolou,
Nima Tolou
Department of Precision
and Microsystems Engineering,
Delft University of Technology,
Delft 2628 CD, The Netherlands
and Microsystems Engineering,
Delft University of Technology,
Delft 2628 CD, The Netherlands
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Guy Semon,
Guy Semon
TAG Heuer,
La Chaux-de-Fonds 2300, Switzerland
La Chaux-de-Fonds 2300, Switzerland
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Just L. Herder
Just L. Herder
Department of Precision
and Microsystems Engineering,
Delft University of Technology,
Delft 2628 CD, The Netherlands
and Microsystems Engineering,
Delft University of Technology,
Delft 2628 CD, The Netherlands
Search for other works by this author on:
Sybren L. Weeke
Department of Precision
and Microsystems Engineering,
Delft University of Technology,
Delft 2628 CD, The Netherlands;
and Microsystems Engineering,
Delft University of Technology,
Delft 2628 CD, The Netherlands;
Nima Tolou
Department of Precision
and Microsystems Engineering,
Delft University of Technology,
Delft 2628 CD, The Netherlands
and Microsystems Engineering,
Delft University of Technology,
Delft 2628 CD, The Netherlands
Guy Semon
TAG Heuer,
La Chaux-de-Fonds 2300, Switzerland
La Chaux-de-Fonds 2300, Switzerland
Just L. Herder
Department of Precision
and Microsystems Engineering,
Delft University of Technology,
Delft 2628 CD, The Netherlands
and Microsystems Engineering,
Delft University of Technology,
Delft 2628 CD, The Netherlands
1Corresponding author.
Manuscript received October 10, 2016; final manuscript received December 14, 2016; published online March 9, 2017. Assoc. Editor: James Schmiedeler.
J. Mechanisms Robotics. Apr 2017, 9(2): 021004 (8 pages)
Published Online: March 9, 2017
Article history
Received:
October 10, 2016
Revised:
December 14, 2016
Citation
Weeke, S. L., Tolou, N., Semon, G., and Herder, J. L. (March 9, 2017). "A Monolithic Force-Balanced Oscillator." ASME. J. Mechanisms Robotics. April 2017; 9(2): 021004. https://doi.org/10.1115/1.4035544
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