Abstract
The authors report on the design, configure, and test of isotropic accelerometer strapdowns for high-precision inertial measurement unit (IMU) and folded MEMS configuration. The biaxial low-g MEMS accelerometers are based on the Platonic solids. A Platonic strapdown is integrated into an embedded system for acceleration-array signal acquisition targeting rigid-body pose-and-twist estimation. The electromechanical properties for dynamic sensitivity are tested on a haptic manipulator, which shows that the position estimation matches reasonably well the encoder readouts. The Platonic strapdown is promising in folded MEMS IMU with chip-level miniaturization and high estimation precision.
Issue Section:
Design Innovation Paper
References
1.
Shan
, X.
, Angeles
, J.
, and Forbes
, J.
, 2018
, “Design of a Biaxial High Frequency-Ratio Low-g MEMS Accelerometer
,” Microsyst. Technol.
, 24
(9
), pp. 3851
–3861
. 10.1007/s00542-018-3862-x2.
Zou
, T.
, and Angeles
, J.
, 2018
, “An Algorithm for Rigid-Body Angular Velocity and Attitude Estimation Based on Isotropic Accelerometer Strapdowns
,” ASME J. Appl. Mech.
, 85
(6
), p. 061010
.10.1115/1.40394353.
Yazdi
, N.
, Ayazi
, F.
, and Najafi
, K.
, 1998
, “Micromachined Inertial Sensors
,” Proc. IEEE
, 86
(8
), pp. 1640
–1659
. 10.1109/5.7042694.
Sun
, W.
, Wang
, D.
, Xu
, L.
, and Xu
, L.
, 2013
, “Mems-Based Rotary Strapdown Inertial Navigation System
,” Measurement
, 46
(8
), pp. 2585
–2596
. 10.1016/j.measurement.2013.04.0355.
Chen
, J. H.
, Lee
, S. C.
, and DeBra
, D. B.
, 1994
, “Gyroscope Free Strapdown Inertial Measurement Unit by Six Linear Accelerometers
,” J. Guid. Control Dyn.
, 17
(2
), pp. 286
–290
. 10.2514/3.211956.
Cardou
, P.
, and Angeles
, J.
, 2009
, “Linear Estimation of the Rigid-body Acceleration Field From Point Acceleration Measurements
,” ASME J. Dyn. Syst. Measurement Control
, 131
(4
), p. 041013
. (10 pages). 10.1115/1.31172097.
Li
, R.
, Liu
, J.
, and Lai
, J.
, 2007
, Attitude Determination Method of Mini-Aircraft Inertial Integrated Navigation System
, Patent CN101033973
.8.
Ben
, Y.
, Chai
, Y.
, and Fu
, J.
, 2010
, Optical Fiber Gyro Strapdown Inertial Navigation System Damping Method
, Patent CN101696883
.9.
Chou
, W.
, Ding
, L.
, and Ding
, W.
, 2011
, Strapdown Inertial Navigation Device for Aerospace Application
, Patent CN102235862
.10.
Cappa
, P.
, Patanè
, F.
, and Rossi
, S.
, 2008
, “Two Calibration Procedures for a Gyroscope-Free Inertial Measurement System Based on a Double-Pendulum Apparatus
,” Meas. Sci. Technol.
, 19
(5
), pp. 32
–38
. 10.1088/0957-0233/19/5/05520411.
Efimovskaya
, A.
, Lin
, Y.
, and Shkel
, A.
, 2017
, “Origami-like 3-D Folded MEMS Approach for Miniature Inertial Measurement Unit
,” J. Microelectromech. Syst.
, 26
(5
), pp. 1030
–1039
. 10.1109/JMEMS.2017.270359412.
Zotov
, S.
, Rivers
, M.
, Trusov
, A.
, and Shkel
, A.
, 2011
, “Folded MEMS Pyramid Inertial Measurement Unit
,” IEEE Sens. J.
, 11
(11
), pp. 2780
–2789
. 10.1109/JSEN.2011.216071913.
Agarwal
, K.
, Hwang
, S.
, Bartnik
, A.
, Buchele
, N.
, Mishra
, A.
, and Cho
, J.
, 2018
, “Small-Scale Biological and Artificial Multidimensional Sensors for 3d Sensing
,” SMALL
, 14
(35
), p. 1801145
. 10.1002/smll.20180114514.
Lin
, Y. W.
, Efimovskaya
, A.
, and Shkel
, A. M.
, 2017
, “Study of Environmental Survivability and Stability of Folded MEMS IMU
,” 2017 4th IEEE International Symposium on Inertial Sensors and Systems (Inertial)
, Kauai, HI
, Mar. 27–30
, pp. 132
–135
.15.
Simon
, D.
, 2006
, Optimal State Estimation: Kalman, H∞, and Nonlinear Approaches
, John Wiley & Sons, Inc.
, Hoboken, New Jersey
.16.
Cheng
, H.
, and Gupta
, K.
, 1989
, “An Historical Note on Finite Rotations
,” ASME J. Appl. Mech.
, 56
(1
), pp. 139
–142
. 10.1115/1.317603417.
Juang
, J.-N.
, and Phan
, M. Q.
, 2001
, Identification and Control of Mechanical Systems
, Cambridge University Press
, Cambridge, UK
.18.
Terze
, Z.
, Muller
, A.
, and Zlatar
, D.
, 2015
, “Lie-group Integration Method for Constrained Multibody Systems in State Space
,” Multibody Syst. Dyn.
, 34
(3
), pp. 275
–305
. 10.1007/s11044-014-9439-219.
Crassidis
, J. L.
, and Junkins
, J. L.
, 2011
, Optimal Estimation of Dynamic Systems
, 2nd ed., Chapman and Hall/CRC
, New York
.20.
Brand
, L.
, 1965
, Advanced Calculus
, John Wiley & Sons
, New York
.21.
Wohlhart
, K.
, 1991
, “Der Homogene Paralleltrieb-mechanismus
,” Mathematica Pannonica
, 2
(2
), pp. 59
–76
.22.
Shan
, X.
, Angeles
, J.
, and Forbes
, J.
, 2019
, “A Novel Capacitive Sensing Structure for Simultaneous Detection of Biaxial Low-g Acceleration in a Commercial MEMS Process
,” Microsyst. Technol.
, 25
(12
), pp. 4475
–4481
. 10.1007/s00542-019-04432-0Copyright © 2020 by ASME
You do not currently have access to this content.