In this paper, a microsystem with prescribed functional capabilities is designed and simulated. In particular, the development of a straight line path generator micro electro mechanical system (MEMS) device is presented. A new procedure is suggested for avoiding branch or circuit problems in the kinematic synthesis problem. Then, Ball's point detection is used to validate the obtained pseudo-rigid body model (PRBM). A compliant MEMS device is obtained from the PRBM through the rigid-body replacement method by making use of conjugate surfaces flexure hinges (CSFHs). Finally, the functional capability of the device is investigated by means of finite element analysis (FEA) simulations and experimental testing at the macroscale.
Kinematic Synthesis of a D-Drive MEMS Device With Rigid-Body Replacement Method
Contributed by the Design Innovation and Devices of ASME for publication in the JOURNAL OF MECHANICAL DESIGN. Manuscript received September 5, 2017; final manuscript received March 24, 2018; published online April 25, 2018. Assoc. Editor: David Myszka.
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Sanò, P., Verotti, M., Bosetti, P., and Belfiore, N. P. (April 25, 2018). "Kinematic Synthesis of a D-Drive MEMS Device With Rigid-Body Replacement Method." ASME. J. Mech. Des. July 2018; 140(7): 075001. https://doi.org/10.1115/1.4039853
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