A new and comprehensive analytical model for membrane microcompressors driven axially by a single lead zirconium titanate (PZT) stack actuator that incorporates assembly variation errors is presented. The model can be used as a future design aid, to predict dynamic device performance as a function of error severity and as microcompressor dimensions are scaled down from the macro to micro scale. The major conclusion of this work is that since micro compressors can be made adjustable to achieve maximum compression ratio another factor besides assembly variation error reduces the achievable compression ratio. An analytical method to predict the maximum pressure to within ∼5% of that experimentally measured is developed. Also, a numerical method to predict the maximum pressure to within ∼0.6% of that experimentally measured is defined. Moreover, an analytical method to predict the compression ratio degradation factor as a function of assembly variation error for adjustable and fixed devices is presented. It is shown that compression ratio is a function of this single net error parameter, and that this function is scale invariant. The model also outputs membrane moments, vertical shear forces, and stresses throughout actuation cycles.

References

References
1.
Radebaugh
,
R.
, 2000, “
Pulse Tube Cryocoolers for Cooling Infrared Sensors
,”
Proceedings Infrared Technology and Applications XXVI
, Vol.
4130
,
B. F.
Andresen
,
G. F.
Fulop
, and
M.
Strojnik
, eds., SPIE, pp.
363
379
.
2.
Krabach
,
T.
, 2000, “
Breakthrough Sensor Technology for Space Exploration in the 21st Century
,”
Proceedings Aerospace Conference
, Vol.
6
,
Big Sky, IEEE
, pp.
565
569
.
3.
Park
,
J.-H.
,
Yokota
,
S.
, and
Yoshida
,
K.
, 2002, “
A Piezoelectric Micropump Using Resonance Drive With High Power Density
,”
Jpn Soc. Mech. Eng. Int. J. Ser. C
,
45
, pp.
502
509
.
4.
Li
,
H. Q.
,
Roberts
,
D. C.
,
Steyn
,
J. L.
,
Turner
,
K. T.
,
Carretero
,
J. A.
,
Yaglioglu
,
O.
,
Su
,
Y.-H.
,
Saggere
,
L.
,
Hagood
,
N. W.
,
Spearing
,
S. M.
, and
Schmidt
,
M. A.
, 2000, “
A High Frequency High Flow Rate Piezoelectrically Driven MEMS Micropump
,”
Proceedings Solid State Sensors and Actuators Workshop
,
IEEE
,
Hilton Head
, pp.
69
72
.
5.
Yoon
,
J. S.
,
Choi
,
J. W.
,
Kim
,
M. S.
,
Yoo
,
Y-E.
, and
Choi
,
D.-S
, 2009, “
Studies on the Performance Characteristics and Improvements of the Piezoelectrically-Driven Micro Gas Compressors
,”
Microelectron. Eng.
86
, pp.
2297
2304
.
6.
Laser
,
D. J.
, and
Santiago
,
J. G.
, 2004, “
A Review of Micropumps
,”
J. Micromech. Microeng.
14
, pp.
R35
R64
.
7.
Simon
,
M. J.
,
DeLuca
,
C.
,
Bright
,
V. M.
,
Lee
,
Y. C.
,
Bradley
,
P. E.
, and
Radebaugh
,
R.
, 2008, “
Development of a Piezoelectric Microcompressor for a Joule-Thomson Microcryocooler
,”
Cryocoolers
, Vol.
15
,
S. D.
Miller
and
R. G.
Ross
, Jr.
, eds.,
Boulder
,
International Cryocooler Conference
, pp.
441
450
.
8.
Fung
,
Y. C.
, and
Tong
,
P.
, 2001,
Classical and Computational Solid Mechanics (Advanced Series in Engineering Science Vol. 1)
,
Singapore
,
World Scientific Publishing Co. Pte. Ltd.
, pp.
135
, 288–290, and
580
.
9.
2008, “Piezoelectrics in Positioning Tutorial on Piezotechnology in Nanopositioning Applications,” Physik Instrumente GmbH and Co. KG, Karlsrue, p. 37, http://www.physikinstrumente.com/.
10.
Timoshenko
,
S. P.
and
Goodier
,
J. N.
, 1970,
Theory of Elasticity
,
3rd ed.
,
New York
,
McGraw-Hill Book Co.
, pp.
83
84
.
11.
Timoshenko
,
S.
, and
Woinowsky-Krieger
,
S.
, 1959,
Theory of Plates and Shells
,
2nd ed.
,
McGraw-Hill Book Co.
,
New York
, pp.
5
,
54
.
12.
Selvadurai
,
A. P. S.
, 2000,
Partial Differential Equations in Mechanics 2 The Biharmonic Equation Poisson’s Equation
,
Springer-Verlag
,
Berlin
, p.
166
.
13.
Ventsel
,
E.
, and
Krauthammer
,
T.
, 2001,
Thin Plates and Shells Theory, Analysis, and Applications
,
New York
,
Marcel Dekker, Inc.
, pp. 3 and
96
97
.
14.
Zahnd
,
J. V.P.
,
Engineering and APC International, Ltd., Product Operations Manager
, 2011, private communication.
15.
2002,
Piezoelectric Ceramics: Principles and Applications
, APC International, Ltd., pp.
59
61
.
16.
2011,
Low Voltage Co-Fired Multilayer Stacks, Rings and Chips for Actuation
, APC International, Ltd., pp.
22
23
.
17.
2011,
Piezo-Mechanics: An Introduction
, APC International, Ltd., p.
7
.
You do not currently have access to this content.