This paper introduces the design implementation of 3-DoF Microelectromechanical Systems (MEMS) based gyroscope concept, which allows shaping up the dynamic response without using advance control system strategies, with less compromise in performance. The proposed architecture utilizes an active–passive mass configuration in order to achieve the dynamic amplification of the oscillation in 2-DoF drive-mode. A comprehensive theoretical description, dynamics, and mechanical design configuration of the proposed gyroscope design are discussed in detail. A complete test methodology has also been devised for the proposed nonresonant 3-DoF gyroscope. A cost effective commercially available metal-multi user MEMS process is used to fabricate a 20 μm thick nickel based micromachined vibratory gyroscope with an overall chip size of 2.2 mm × 2.6 mm. A good agreement is found between the tested and the simulated results. The experimental characterization demonstrated that the wide bandwidth frequency response of the 2-DoF drive-mode oscillator consists of two resonant peaks at 754 Hz and 2.170 kHz, respectively, with a flat region of 1.4 kHz between the peaks, defining the operational frequency region. The sense-mode resonant frequency lies within this region at 1.868 kHz allowing the amplitude of the response to be insensitive to structural parameter and damping variations, with improved robustness against such variations. The passive mass achieved a dynamic amplification of three times at first resonant peak of 754 Hz and five times at the second resonant peak of 2.170 kHz in comparison with the active mass, resulting in improved sensitivity in response to the Coriolis torque induced due to rotation.

References

References
1.
Yazdi
,
N.
,
Ayazi
,
F.
, and
Najafi
,
K.
, 1998, “
Micromachined Inertial Sensors
,”
Proc. IEEE
,
86
(
8
), pp.
1640
1659
.
2.
Shkel
,
A.
, 2006, “
Type I and Type II Micromachined Vibratory Gyroscopes
,”
Proceedings of the IEEE/ION Position, Location, and Navigation Symposium
, pp.
586
593
.
3.
Shkel
,
A.
,
Howe
,
R.T.
, and
Horowitz
,
R.
, 1999, “
Modeling and Simulation of Micromachined Gyroscopes in the Presence of Imperfections
,”
International Conference on Modeling and Simulation of Microsystems
,
Puerto Rico
, pp.
605
608
.
4.
Shkel
,
A.
,
Horowitz
,
R.
,
Seshia
,
A.
,
Park
,
S.
, and
Howe
,
R.T.
, 1999, “
Dynamics and Control of Micromachined Gyroscopes
,”
American Control Conference
,
CA
.
5.
Schofeld
,
A. R.
,
Trusov
,
A. A.
, and
Shkel
,
A. M.
, 2008, “
Effects Of Operational Frequency Scaling in Multi-Degree of Freedom Mems Gyroscopes
,”
IEEE Sens. J.
,
8
(
10
), pp.
1672
1680
.
6.
Weinberg
,
M.
, and
Kourepenis
,
A.
, 2006, “
Error Sources in In-Plane Silicon Tuning Fork Mems Gyroscopes
,”
J. Microelectromech. Syst.
,
15
(
3
), pp.
479
491
.
7.
Acar
,
C.
, and
Shkel
,
A.
, 2003, ”
Nonresonant Micromachined Gyroscopes With Structural Mode-Decoupling
,”
IEEE Sens. J.
,
3
(
4
), pp.
497
506
.
8.
Acar
,
C.
, and
Shkel
,
A.
, 2006, “
Inherently Robust Micromachined Gyroscopes With 2-Dof Sense-Mode Oscillator
,”
IEEE J. Microelectromech. Syst.
,
15
(
2
), pp.
380
387
.
9.
Trusov
,
A. A.
,
Schoffeld
,
A. R.
, and
Shkel
,
A. M.
, 2009, “
Performance Characterization of a New Temperature-Robust Gain- Bandwidth Improved Mems Gyroscope Operated in Air
,”
Sens. Actuators, A
155
, pp.
16
22
.
10.
Jeon
,
H.
,
Lee
,
J.-Y.
,
Jung
,
H.-K.
,
Chang
,
H.-K.
, and
Kim
,
Y.-K.
, 2005, “
Two Mass System With Wide Bandwidth for SioG (Silicon On Glass) Vibratory Gyroscopes
,”
Proceedings of the International Conference Solid State Sensors, Actuators, and Microsystem
,
Seoul, Korea
, Jun. 59, pp.
539
542
.
11.
Dyck
,
C. W.
,
Allenand
,
J. J.
, and
Huber
,
R. J.
, 1999, “
Parallel-Plate Electrostatic Dual-Mass Oscillator
,”
Proceeding of SPIE
,
SOE, CA
.
12.
Tang
,
W. C.
, 1990, “
Electrostatic Comb-Drive for Resonant Sensor and Actuator Applications
,” Ph.D. thesis, University of California, Berkeley.
13.
Kuehnel
,
W.
, 1995, “
Modeling of the Mechanical Behavior of a Differential Capacitor Acceleration Sensors
,”
Sens. Actuators, A
,
48
, pp.
101
108
.
14.
Cowen
,
A.
,
Dudley
,
B.
,
Hill
,
E.
,
Walters
,
M.
,
Wood
,
R.
,
Johnson
,
S.
,
Wynands
,
H.
, and
Hardy
,
B.
, 2006,
MetalMUMPs Design Hand book
,
MEMSCap Inc.
Durham, NC.
15.
INTELLISUITE Technical Reference Manual
8.2, 2007, IntelliSense Inc.
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