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Keywords: focused ion beam technology
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Eng. Mater. Technol. October 2004, 126(4): 457–464.
Published Online: November 9, 2004
.... 21 October 2003 26 April 2004 09 11 2004 diamond-like carbon aluminium compounds thin films internal stresses elasticity finite element analysis focused ion beam technology stress measurement The stress-relaxation technique is one of the most popular methods...