Important from exploitation point of view mechanical properties of single-layer, double-layer, and mixed alumina and ceria films and their stainless steel (SS) substrate were investigated by means of nanoindentation experiments. As a result, we obtained the experimental load–displacement curves and calculated the indentation hardness (HIT) and indentation modulus (EIT), by means of Oliver and Pharr approximation method. Numerical simulations of the process of nanoindentation by means of finite element method were performed as well, in order to obtain more information about the plastic properties of the investigated films. The obtained results show that the mixed Al2O3+Ce2O3 film, obtained at dominant concentration of cerium ions in the working electrolyte, has the highest indentation hardness and modulus, followed by the single Ce2O3-CeO2 film, the mixed Al2O3+Ce2O3 film, obtained at dominant concentration of aluminum ions in the working electrolyte, the double Ce2O3-CeO2/Al2O3 layer, and single Al2O3 layer.

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