Recently, a new method for residual stress measurement in thin films by using the focused ion beam (FIB) has been proposed by the authors. It is based on the combined capability of the FIB imaging system and of high-resolution strain mapping software (VIC-2D). A simple equation based on two-dimensional elasticity is used to evaluate the residual stress from the displacements due to introducing a slot. The slot length is assumed to be much larger than the slot width or depth. And the effect of the slot width was neglected. However, it is often hard, depending on film materials, to introduce a narrow and deep slot by FIB. In this work some practical issues regarding the slot geometry are addressed. Through two- and three-dimensional finite element analyses, it is explored how the slot length, width and measurement location affect the displacements which are the basic data for residual stress evaluation. As a result, the validity and limit of the equations based on two-dimensional elasticity are evaluated. Also, the effect of material dissimilarity between film and substrate is explored. Finally, examples for a diamond-like carbon film on glass substrate and an aluminum oxide film thermally grown upon an alloy are presented.
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October 2004
Research Papers
Effect of Geometry and Materials on Residual Stress Measurement in Thin Films by Using the Focused Ion Beam
Ki-Ju Kang,
Ki-Ju Kang
Department of Mechanical Engineering, Chonnam National University, Kwangju, 500-757, Korea
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Severine Darzens,
Severine Darzens
Princeton Materials Institute, Princeton University, Princeton, NJ 08540
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Gee-Seob Choi
Gee-Seob Choi
Department of Mechanical Engineering, Chonnam National University, Kwangju, 500-757, Korea
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Ki-Ju Kang
Department of Mechanical Engineering, Chonnam National University, Kwangju, 500-757, Korea
Severine Darzens
Princeton Materials Institute, Princeton University, Princeton, NJ 08540
Gee-Seob Choi
Department of Mechanical Engineering, Chonnam National University, Kwangju, 500-757, Korea
Contributed by the Materials Division for publication in the JOURNAL OF ENGINEERING MATERIALS AND TECHNOLOGY. Manuscript received by the Materials Division October 21, 2003; revision received April 26, 2004. Associate Editor: S. Mall.
J. Eng. Mater. Technol. Oct 2004, 126(4): 457-464 (8 pages)
Published Online: November 9, 2004
Article history
Received:
October 21, 2003
Revised:
April 26, 2004
Online:
November 9, 2004
Citation
Kang, K., Darzens, S., and Choi, G. (November 9, 2004). "Effect of Geometry and Materials on Residual Stress Measurement in Thin Films by Using the Focused Ion Beam ." ASME. J. Eng. Mater. Technol. October 2004; 126(4): 457–464. https://doi.org/10.1115/1.1789965
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