The shape memory effect, superelasticity and two-way shape memory effect of Ni-rich Ti-Ni sputter-deposited thin films were evaluated quantitatively. The results indicated that they are almost comparable to those of bulk specimens. On the other hand, Ti-rich Ti-Ni thin films were found to exhibit a good shape memory behavior owing to a peculiar fine microstructure unlike bulk specimens. Addition of Cu or Pd to a Ti-50at.%Ni thin film was also confirmed to improve the shape memory behavior. These results suggest that shape memory thin films are a promising material for microactuators.

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