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Keyword: subsurface damage
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Journal Articles
Article Type: Research Papers
J. Manuf. Sci. Eng. October 2019, 141(10): 101012.
Paper No: MANU-18-1639
Published Online: September 4, 2019
...Jingfei Yin; Qian Bai; Bi Zhang A silicon wafer is important for the electronic and computer industries. However, subsurface damage (SSD), which is detrimental to the performance and lifetime of a silicon chip, is easily induced in a silicon wafer during a grinding process since silicon is...
Journal Articles
Article Type: Technical Briefs
J. Manuf. Sci. Eng. December 2012, 134(6): 064501.
Published Online: November 1, 2012
... January 25, 2011; final manuscript received August 30, 2012; published online November 1, 2012. Assoc. Editor: Allen Y. Yi. 25 01 2011 30 08 2012 This paper presents a preliminary study about effects of ultrasonic vibration on machined surface and subsurface damages in rotary...
Journal Articles
Article Type: Technical Briefs
J. Manuf. Sci. Eng. October 2007, 129(5): 961–964.
Published Online: March 9, 2007
... material removal from magnetic material surfaces. Our approach is to place an MRF spot on machined surfaces of magnetic WC-Co materials. The resulting surface roughness is comparable to that produced on nonmagnetic materials. This spotting technique may be used to evaluate the depth of subsurface damage...