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Keyword: silicon wafer
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Journal Articles
Article Type: Research Papers
J. Manuf. Sci. Eng. October 2019, 141(10): 101012.
Paper No: MANU-18-1639
Published Online: September 4, 2019
...Jingfei Yin; Qian Bai; Bi Zhang A silicon wafer is important for the electronic and computer industries. However, subsurface damage (SSD), which is detrimental to the performance and lifetime of a silicon chip, is easily induced in a silicon wafer during a grinding process since silicon is...
Journal Articles
Article Type: Research Papers
J. Manuf. Sci. Eng. October 2012, 134(5): 051010.
Published Online: September 10, 2012
...X. Brun; S. N. Melkote This paper presents the modeling and analysis of the pressure distribution and lifting force generated by a Bernoulli gripper when handling flexible substrates such as thin silicon wafers. A Bernoulli gripper is essentially a radial airflow nozzle used to handle large and...
Journal Articles
Article Type: Technical Papers
J. Manuf. Sci. Eng. April 2007, 129(2): 281–286.
Published Online: September 18, 2006
...M. B. Cai; X. P. Li; M. Rahman In nanoscale ductile mode cutting of the monocrystalline silicon wafer, micro-, or nanogrooves on the diamond cutting tool flank face are often observed, which is beyond the understanding based on conventional cutting processes because the silicon workpiece material...