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Keywords: Semiconductor Manufacturing
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. July 2024, 146(7): 070908.
Paper No: MANU-23-1366
Published Online: June 10, 2024
... Root Cause and Yield Analysis ,” Proceedings of the Advanced Semiconductor Manufacturing Conference (ASMC'16) , Saratoga Springs, NY , May 16–19 . [3] Zhu , J. , Liu , J. , Xu , T. , Yuan , S. , Zhang , Z. , Jiang , H. , Gu , H. , Zhou , R. , and Liu , S...
Journal Articles
Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. July 2024, 146(7): 070906.
Paper No: MANU-23-1591
Published Online: May 9, 2024
[email protected] 24 09 2023 29 03 2024 01 04 2024 09 05 2024 Graphical Abstract Figure semiconductor wafer inspection automated visual inspection autonomous data annotation defect localization metrology semiconductor manufacturing sensing monitoring and diagnostics...
Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. July 2024, 146(7): 070904.
Paper No: MANU-23-1598
Published Online: April 22, 2024
.... Y. , 2019 , “ A Voting Ensemble Classifier for Wafer Map Defect Patterns Identification in Semiconductor Manufacturing ,” IEEE Trans. Semicond. Manuf. , 32 ( 2 ), pp. 171 – 182 . 10.1109/TSM.2019.2904306 [16] Tsai , T. H. , and Lee , Y. C. , 2020 , “ A Light-Weight Neural...
Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. July 2024, 146(7): 070902.
Paper No: MANU-23-1590
Published Online: April 22, 2024
[email protected] 1 Corresponding author. Email: [email protected] 24 09 2023 22 03 2024 26 03 2024 22 04 2024 Graphical Abstract Figure semiconductor manufacturing weakly supervised semantic segmentation National Research Foundation of Korea 10.13039...
Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. July 2024, 146(7): 070903.
Paper No: MANU-23-1525
Published Online: April 22, 2024
... learning semiconductor manufacturing transfer learning wafer bin map Graphical Abstract Figure 24 08 2023 29 03 2024 29 03 2024 22 04 2024 1 Corresponding author. Email: [email protected] For MatchingNet, we used the adam optimizer with a batch...
Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. April 2024, 146(4): 041001.
Paper No: MANU-23-1378
Published Online: February 26, 2024
... engineering semiconductor manufacturing Directorate for Engineering 10.13039/100000084 1825772 The growth process of VACNT forests from substrate-bound catalyst nanoparticles by CVD involves several atomic-scale processes that control the formation and self-organization of carbon atoms...
Journal Articles