Mechanical polishing is one of the essential attributes of nanofinishing. To maintain precision during nanofinishing process, the mechanical polishing needs to be studied and analyzed at nanometric scale. In view of this, a set of molecular dynamics simulation has been carried out to analyze the process behavior and its effects on abrasive particles. After simulation, it is observed that the finishing force and velocity damage the abrasive particle by changing its phase from diamond cubic to graphite. Thus, the abrasive particles need replacement in a scheduled time-bound manner. In addition, a strategy has been proposed for efficient and economic polishing.

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