In highly flexible and integrated manufacturing systems, such as semiconductor manufacturing, the strong dynamic interactions between the equipment condition, operations executed on the equipment, and the resulting product quality necessitate a methodology that integrates the decision-making process across the domains of maintenance scheduling and production operations. Currently, maintenance and production operations decision-making are two decoupled processes. In this paper, we devise an integrated decision-making policy for maintenance scheduling and production sequencing, with the objective of optimizing a customizable objective function, while taking into account operation-dependent degradation models and a production target. Optimization was achieved using a metaheuristic method based on the results of discrete-event simulations of the target manufacturing system. The new approach is demonstrated in simulations of a generic cluster tool routinely used in semiconductor manufacturing. The results show that jointly making maintenance and production sequencing decisions consistently and often significantly outperforms the current practice of making these decisions separately.

References

References
1.
Heng
,
A.
,
Zhang
,
S.
,
Tan
,
A. C. C.
, and
Mathew
,
J.
,
2009
, “
Rotating Machinery Prognostics: State of the Art, Challenges and Opportunities
,”
Mech. Syst. Signal Process.
,
23
(
3
), pp.
724
739
.10.1016/j.ymssp.2008.06.009
2.
Wang
,
H.
,
2002
, “
A Survey of Maintenance Policies of Deteriorating Systems
,”
Eur. J. Oper. Res.
,
139
(
3
), pp.
469
489
.10.1016/S0377-2217(01)00197-7
3.
Lee
,
S.
,
Djurdjanovic
,
D.
, and
Ni
,
J.
,
2007
, “
Optimal Condition-Based Maintenance Decision Making for a Cluster Tool
,”
TECHCON
,
Austin, TX
, Sept. 10–12, pp. 1–4.
4.
Marseguerra
,
M.
,
Zio
,
E.
, and
Podofillini
,
L.
,
2002
, “
Condition-Based Maintenance Optimization by Means of Genetic Algorithms and Monte Carlo Simulation
,”
Reliab. Eng. Syst. Saf.
,
77
(
2
), pp.
151
166
.10.1016/S0951-8320(02)00043-1
5.
Zhou
,
J.
,
Djurdjanovic
,
D.
,
Ivy
,
J.
, and
Ni
,
J.
,
2007
, “
Integrated Reconfiguration and Age-Based Preventive Maintenance Decision Making
,”
IIE Trans.
,
39
(
12
), pp.
1085
1102
.10.1080/07408170701291779
6.
Ben Ali
,
M.
,
Sassi
,
M.
,
Gossa
,
M.
, and
Harrath
,
Y.
,
2011
, “
Simultaneous Scheduling of Production and Maintenance Tasks in the Job Shop
,”
Int. J. Prod. Res.
,
49
(
13
), pp.
3891
3918
.10.1080/00207543.2010.492405
7.
Coley
,
D. A.
,
1999
,
An Introduction to Genetic Algorithms for Scientists and Engineers
,
World Scientific
,
Singapore.
8.
Jin
,
Y.-L.
,
Jiang
,
Z.-H.
, and
Hou
,
W.-R.
,
2009
, “
Integrating Flexible-Interval Preventive Maintenance Planning With Production Scheduling
,”
Int. J. Comput. Integr. Manuf.
,
22
(
12
), pp.
1089
1101
.10.1080/09511920903207449
9.
Yang
,
Z.
,
Djurdjanovic
,
D.
, and
Ni
,
J.
,
2007
, “
Maintenance Scheduling for a Manufacturing System of Machines With Adjustable Throughput
,”
IIE Trans.
,
39
(
12
), pp.
1111
1125
.10.1080/07408170701315339
10.
Iravani
,
S. M. R.
, and
Duenyas
,
I.
,
2002
, “
Integrated Maintenance and Production Control of a Deteriorating Production System
,”
IIE Trans.
,
34
(
5
), pp.
423
435
.
11.
Yao
,
X.
,
Xie
,
X.
,
Fu
,
M. C.
, and
Marcus
,
S. I.
,
2005
, “
Optimal Joint Preventive Maintenance and Production Policies
,”
Nav. Res. Logist.
,
52
(
7
), pp.
668
681
.10.1002/nav.20107
12.
Jin
,
X.
, and
Ni
,
J.
,
2013
, “
Joint Production and Preventive Maintenance Strategy for Manufacturing Systems With Stochastic Demand
,”
ASME J. Manuf. Sci. Eng.
,
135
(
3
), p.
031016
.10.1115/1.4024042
13.
Kazaz
,
B.
, and
Sloan
,
T. W.
,
2008
, “
Production Policies Under Deteriorating Process Conditions
,”
IIE Trans.
,
40
(
3
), pp.
187
205
.10.1080/07408170701488060
14.
Cai
,
Y.
,
Hasenbein
,
J.
,
Kutanoglu
,
E.
, and
Liao
,
M.
,
2013
, “
Single-Machine Multiple-Recipe Predictive Maintenance
,”
Probab. Eng. Inf. Sci.
,
27
(
2
), pp.
209
235
.10.1017/S0269964812000423
15.
Zhou
,
J.
,
Djurdjanovic
,
D.
,
Ivy
,
J.
, and
Ni
,
J.
,
2007
, “
Integrated Load-Allocation and Condition-Based Maintenance Policy in a Multi-Unit Load-Sharing Deteriorating System
,”
Proceedings of the 61st Meeting of the Society for Machinery Failure Prevention Technology
,
Virginia Beach, VA
, pp.
215
228
.
16.
Sloan
,
T. W.
, and
Shanthikumar
,
J. G.
,
2000
, “
Combined Production and Maintenance Scheduling for a Multiple-Product, Single-Machine Production System
,”
Prod. Oper. Manage.
,
9
(
4
), pp.
379
399
.10.1111/j.1937-5956.2000.tb00465.x
17.
Sloan
,
T.
,
2004
, “
A Periodic Review Production and Maintenance Model With Random Demand, Deteriorating Equipment, and Binomial Yield
,”
J. Oper. Res. Soc.
,
55
(
6
), pp.
647
656
.10.1057/palgrave.jors.2601725
18.
Sloan
,
T. W.
, and
Shanthikumar
,
J. G.
,
2002
, “
Using In-Line Equipment Condition and Yield Information for Maintenance Scheduling and Dispatching in Semiconductor Wafer Fabs
,”
IIE Trans.
,
34
(
2
), pp.
191
209
.
19.
Lee
,
S.
,
Li
,
L.
, and
Ni
,
J.
,
2013
, “
Markov-Based Maintenance Planning Considering Repair Time and Periodic Inspection
,”
ASME J. Manuf. Sci. Eng.
,
135
(
3
), p.
031013
.10.1115/1.4024152
20.
Wijnmalen
,
D. J. D.
, and
Hontelez
,
J. A. M.
,
1997
, “
Coordinated Condition-Based Repair Strategies for Components of a Multi-Component Maintenance System With Discounts
,”
Eur. J. Oper. Res.
,
98
(
1
), pp.
52
63
.10.1016/0377-2217(95)00312-6
21.
Celen
,
M.
, and
Djurdjanovic
,
D.
,
2012
, “
Operation-Dependent Maintenance Scheduling in Flexible Manufacturing Systems
,”
CIRP J. Manuf. Sci. Technol.
,
5
(
4
), pp.
296
308
.10.1016/j.cirpj.2012.09.005
22.
Glover
,
F.
, and
Laguna
,
M.
,
1997
,
Tabu Search
,
Kluwer Academic Publishers
,
Boston, MA
.
23.
Sawa
,
T.
,
Furukawa
,
T.
,
Nomoto
,
M.
,
Nagasawa
,
T.
,
Sasaki
,
T.
,
Deno
,
K.
, and
Maekawa
,
T.
,
1999
, “
Automatic Scheduling Method Using Tabu Search for Maintenance Outage Tasks of Transmission and Substation System With Network Constraints
,”
IEEE Power Engineering Society 1999 Winter Meeting
, Vol.
2
, pp.
895
900
.
24.
El-Amin
,
I.
,
Duffuaa
,
S.
, and
Abbas
,
M.
,
2000
, “
A Tabu Search Algorithm for Maintenance Scheduling of Generating Units
,”
Electr. Power Syst. Res.
,
54
(
2
), pp.
91
99
.10.1016/S0378-7796(99)00079-6
25.
Gopalakrishnan
,
M.
,
Mohan
,
S.
, and
He
,
Z.
,
2001
, “
A Tabu Search Heuristic for Preventive Maintenance Scheduling
,”
Comput. Ind. Eng.
,
40
(
1–2
), pp.
149
160
.10.1016/S0360-8352(01)00014-6
26.
Kim
,
H.
,
Hayashi
,
Y.
, and
Nara
,
K.
,
1997
, “
An Algorithm for Thermal Unit Maintenance Scheduling Through Combined Use of GA, SA and TS
,”
IEEE Trans. Power Syst.
,
12
(
1
), pp.
329
335
.10.1109/59.574955
27.
Glover
,
F.
,
Taillard
,
E.
, and
de Werra
,
D.
,
1993
, “
A User's Guide to Tabu Search
,”
Ann. Oper. Res.
,
41
(
1
), pp.
3
28
.10.1007/BF02078647
28.
Banks
,
J.
,
2000
,
Getting Started With Automod
,
Brooks Automation
, Chelmsford, MA.
29.
Geyik
,
F.
, and
Cedimoglu
,
I.
,
2004
, “
The Strategies and Parameters of Tabu Search for Job-Shop Scheduling
,”
J. Intell. Manuf.
,
15
(
4
), pp.
439
448
.10.1023/B:JIMS.0000034106.86434.46
30.
Jin
,
L.
,
Miyawaki
,
K.
, and
Suzuki
,
K.
,
2013
, “
Optimal Maintenance Policy for Partially Observable Markovian Deteriorating System Subject to a Restorable Varying Environment
,”
J. Reliab. Eng. Assoc. Japan
,
35
(
3
), pp.
177
187
.
You do not currently have access to this content.