Steadily improving performance of inertial sensors necessitates significant enhancement of the methods and equipment used for their evaluation. As the nonlinearity of sensors decreases and gets close to that of the exciters, new challenges arise. One of them, addressed in this research, is a superposition of errors caused by the nonlinearity of tested devices with nonlinear distortions of excitation employed for experimental evaluation. This can lead to a cancellation, at least partial, of the effects of both imperfections and underestimation of the actual distortions of the evaluated sensors. We implement and analyze several system architectures and evaluate components of applicable motion generation systems from the viewpoint of satisfying the relevant, often conflicting requirements posed by the evaluation of high performance inertial sensors. Robust mechanical integration of the guidance, actuation, and measurement functions emerges as a key factor for achieving the needed quality of generated test patterns. We find precision air bearing stages, such as ABL1500 series (Aerotech) most suitable for implementing the needed experimental setup. We propose an architecture with two reciprocating stages, implement and evaluate its core components, and illustrate its performance with experimental results.

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