Ultrafast Laser Induced Structural Modification of Fused Silica—Part I: Feature Formation Mechanisms

Nonlinear absorption of femtosecond-laser pulses enables the induction of structural changes in the interior of bulk transparent materials without affecting their surface. This property can be exploited for transmission welding of transparent dielectrics, three dimensional optical data storages, and waveguides. In the present study, femtosecond-laser pulses were tightly focused within the interior of bulk fused silica specimen. Localized plasma was formed, initiating rearrangement of the network structure. Features were generated through employment of single pulses as well as pulse trains using various processing conditions. The change in material properties were studied through employment of differential interference contrast optical microscopy and atomic force microscopy. The morphology of the altered material as well as the nature of the physical mechanisms (thermal, explosive plasma expansion, or in-between) responsible for the alteration of material properties as a function of process parameters is discussed.