Microscale laser dynamic forming $(μLDF)$ is a novel microfabrication technique to introduce complex 3D profiles in thin films. This process utilizes pulse laser to generate plasma to induce shockwave pressure into the thin film, which is placed above a microsized mold. The strain rate in $μLDF$ reaches $106–107 S−1$. Under these ultrahigh strain rates in microscale, deformation behaviors of materials are very complicated and almost impossible to be measured in situ experimentally. In this paper, a finite element method model is built to simulate the $μLDF$ process. An improved Johnson–Cook model was used to calculate the flow stress, and the Johnson–Cook failure criterion was employed to simulate failure during $μLDF$. The simulation results are validated by experiments, in which the deformation of Cu thin foils after $μLDF$ experiments are characterized by scanning electron microscopy and compared with simulation results. With the verified model, the ultrafast $μLDF$ process is generally discussed first. A series of numerical simulations are conducted to investigate the effects of critical parameters on deformation behaviors. These critical parameters include the ratio of the fillet radius to film thickness, the aspect ratio of mold, as well as laser intensities. The relationship of laser pulse energy and the deformation depth is also verified by a series of $μLDF$ experiments.

1.
Zhang
,
J.
,
,
D.
,
Chu
,
C. C.
, and
Cheng
,
G. J.
, 2005, “
Fatigue Life Prediction of Sheet Metal After Laser Forming
,”
ASME J. Manuf. Sci. Eng.
1087-1357,
127
, pp.
157
164
.
2.
Cheng
,
J.
, and
Yao
,
Y. L.
, 2002, “
Microstructure Integrated Modeling of Multiscan Laser Forming
,”
ASME J. Manuf. Sci. Eng.
1087-1357,
124
(
2
), pp.
379
388
.
3.
Cheng
,
G. J.
, and
,
D.
, 2007, “
Structural Characterizations on Microscale Laser Dynamic Forming of Metal Foil
,”
J. Appl. Phys.
0021-8979,
101
(
6
), p.
063108
.
4.
Clauer
,
A. H.
, and
Holbrook
,
J. H.
, 1981, “
Effects of Laser Induced Shock Waves on Metals
,”
Shock Waves and High Strain Phenomena in Metals-Concepts and Applications
,
Plenum
,
New York
, pp.
675
702
.
5.
Fabbro
,
R.
,
Fournier
,
J.
,
Ballard
,
P.
,
Devaux
,
D.
, and
Virmont
,
J.
, 1990, “
Physical Study of Laser-Produced Plasma in Confined Geometry
,”
J. Appl. Phys.
0021-8979,
68
(
2
), pp.
775
784
.
6.
Peyre
,
P.
,
Fabbro
,
R.
,
Berthe
,
L.
, and
Dubouchet
,
C.
, 1996, “
Laser Shock Processing of Materials, Physical Processes Involved and Examples of Applications
,”
J. Laser Appl.
1042-346X,
8
, pp.
135
141
.
7.
Zhang
,
W.
, and
Yao
,
Y. L.
, 2002, “
Micro Scale Laser Shock Processing of Metallic Components
,”
ASME J. Manuf. Sci. Eng.
1087-1357,
124
, pp.
369
378
.
8.
Wu
,
B.
, and
Shin
,
Y. C.
, 2007, “
Two-Dimensional Hydrodynamic Model for Pressures Induced Near the Coating-Water Interface During Laser Shock Peening
,”
J. Appl. Phys.
0021-8979,
101
, p.
103514
.
9.
Johnson
,
G. R.
, and
Cook
,
W. H.
, 1983, “
A Constitutive Model and Data for Metals Subjected to Large Strains, High Strain Rates and High Temperatures
,”
Proceedings of the Seventh International Symposium on Ballistics
, pp.
541
547
.
10.
Johnson
,
G. R.
, and
Cook
,
W. H.
, 1985, “
Fracture Characteristics of Three Metals Subjected to Various Strains, Strain Rates, Temperatures and Pressures
,”
Eng. Fract. Mech.
0013-7944,
21
, pp.
31
48
.
11.
Dassault Systèmes
, 2007, ABAQUS Analysis User Manual, Version 6.7.
12.
Poizat
,
C.
,
Campagne
,
L.
, and
Daridon
,
L.
, 2005, “
Modeling and Simulation of Thin Sheet Blanking Using Damage and Rupture Criteria
,”
Int. J. Form. Processes
1292-7775,
8
(
1
), pp.
29
47
.
13.
Balanethiram
,
V. S.
,
Hu
,
X.
,
Altynova
,
M.
, and
Daehn
,
G. S.
, 1994, “
Hyperplasticity, Enhanced Formability at High Rates
,”
J. Mater. Process. Technol.
0924-0136,
45
, pp.
595
600
.
14.
Simha
,
C. H. M.
,
Grantab
,
R.
, and
Worswick
,
M. J.
, 2007, “
Computational Analysis of Stress-Based Forming Limit Curves
,”
Int. J. Solids Struct.
0020-7683,
44
(
25–26
), pp.
8663
8684
.