This paper studies the internal finishing of capillary tubes using a magnetic abrasive finishing process. Such tubes are used with nanoscale technologies and meet the demands of the present age in medical and chemical equipment. The finishing characteristics are influenced by the magnetic abrasive behavior against the inner surface of the capillary, which is controlled by the supplied amount of magnetic abrasive and the magnetic force acting on it. The development of the finishing unit identifies the characteristics of the magnetic field, which controls the magnetic force, required for the necessary magnetic abrasive behavior. Finishing experiments using SUS304 austenitic stainless steel capillary tube with $800μm$ inner diameter demonstrate the effects of the supplied amount of the magnetic abrasive on the finishing characteristics, and the results suggest a standard method to determine the amount to achieve sufficient finishing. The run-out of the capillary while rotating at high speed under the cantilever tube support method causes instability of the magnetic abrasive behavior. The effects on the finishing characteristics are discussed, and a method to diminish the run-out is applied. Accordingly, this paper presents the conditions required for the internal finishing of capillary tubes and proposes methods to realize them. The internal finishing of $400μm$ inner diameter capillary tubes conveys an understanding of the mechanisms involved and demonstrates the usefulness of the proposed methods.

1.
Kawasumi
,
T.
, 2004, “
Fluidized Finishing/Washing Machine
,” Nachi-Business News, 2B3, Nachi-Fujikoshi Corp., Toyama, Japan, pp.
1
6
(in Japanese).
2.
Sugimori
,
H.
, and
Kurobe
,
T.
, 2002, “
High Speed Gyration Flow Finishing of Inner Wall of Capillary Drilled by Electrical Discharge Machining
,”
Journal of Japan Society for Abrasive Technology
,
69
(
2
), pp.
79
84
(in Japanese).
3.
Ogawa
,
H.
, 2005, JP patent, P2005-237938A.
4.
Jiang
,
M.
,
Wood
,
N. O.
, and
Komanduri
,
R.
, 1998, “
On the Chemo-Mechanical Polishing (CMP) of Si3N4 Bearing Balls With Water Based CeO2 Slurry
,”
ASME J. Tribol.
0742-4787,
120
, pp.
304
312
.
5.
Hou
,
Z.
, and
Komanduri
,
R.
, 1998, “
Magnetic Field Assisted Finishing of Ceramics—Part I: Thermal Model
,”
ASME J. Tribol.
0742-4787,
120
, pp.
645
651
.
6.
Hou
,
Z.
, and
Komanduri
,
R.
, 1998, “
Magnetic Field Assisted Finishing of Ceramics—Part II: On Thermal Aspects of Magnetic Float Polishing (MFP) of Ceramics Balls
,”
ASME J. Tribol.
0742-4787,
120
, pp.
652
659
.
7.
Hou
,
Z.
, and
Komanduri
,
R.
, 1998, “
Magnetic Field Assisted Finishing of Ceramics—Part III: On the Thermal Aspects of Magnetic Abrasive Finishing (MAF) of Ceramic Rollers
,”
ASME J. Tribol.
0742-4787,
120
, pp.
660
665
.
8.
Kim
,
W.
,
Lee
,
S.
, and
Min
,
B.
, 2004, “
Surface Finishing and Evaluation of Three-Dimensional Silicon Microchannel Using Magnetorheological Fluid
,”
ASME J. Tribol.
0742-4787,
126
, pp.
772
778
.
9.
Shinmura
,
T.
, and
Yamaguchi
,
H.
, 1995, “
Study on a New Internal Finishing Process by the Application of Magnetic Abrasive Machining-Internal Finishing of Stainless Steel Tube and Clean Gas Bomb
,”
JSME Int. J., Ser. C
1340-8062,
38
(
4
), pp.
798
804
.
10.
Yamaguchi
,
H.
,
Shinmura
,
T.
, and
Kobayashi
,
A.
, 2001, “
Development of an Internal Magnetic Abrasive Finishing Process for Nonferromagnetic Complex Shaped Tubes
,”
JSME Int. J., Ser. C
1340-8062,
44
(
1
), pp.
275
281
.
11.
Yamaguchi
,
H.
,
Shinmura
,
T.
, and
Sekine
,
M.
, 2005, “
Uniform Internal Finishing of SUS304 Stainless Steel Bent Tube Using Magnetic Abrasive Finishing Process
,”
ASME J. Manuf. Sci. Eng.
1087-1357,
127
, pp.
605
611
.
12.
Yamaguchi
,
H.
,
Shinmura
,
T.
, and
Ikeda
,
R.
, 2005, “
Study of Internal Finishing of Slender Tubes by Magnetic Abrasive Finishing
,”
Proceedings of the 3rd International Conference on Leading Edge Manufacturing in 21st Century
, Tokyo, Japan, Vol.
3
, pp.
1181
1186
.
13.
Yamaguchi
,
H.
,
Shinmura
,
T.
, and
Kaneko
,
T.
, 1996, “
Development of a New Internal Finishing Process Applying Magnetic Abrasive Finishing by Use of Pole Rotation System
,”
Int. J. Jpn. Soc. Precis. Eng.
0916-782X,
30
(
4
), pp.
317
322
.
14.
Yamaguchi
,
H.
, and
Shinmura
,
T.
, 2000, “
Study of an Internal Magnetic Abrasive Finishing using a Pole Rotation System—Discussion of the Characteristic Abrasive Behavior
,”
Precis. Eng.
0141-6359,
24
, pp.
237
244
.
15.
Yamaguchi
,
H.
, and
Shinmura
,
T.
, 1995, “
New Internal Finishing Process by Application of Magnetic Abrasive Machining—3rd Report, Effects of Finishing Pressure Distribution on Characteristics
,”
JSME Int. J., Ser. C
1340-8062,
61
(
586
), pp.
2605
2611
(in Japanese).
16.
Yamaguchi
,
H.
,
Shinmura
,
T.
, and
Hashimoto
,
T.
, 2005, “
Study of Simultaneous Internal and External Finishing of Alumina Ceramic Tubes by a Magnetic Field Assisted Finishing
,”
Proceedings of the JSPE Fall Annual Meeting
, Tokyo, Japan, pp.
75
76
(in Japanese).
17.
Yamaguchi
,
H.
,
Shinmura
,
T.
, and
Kanayama
,
M.
, 2005, “
Study of a Magnetic Field Assisted Internal Machining Process of SUS304 Stainless Steel Tubes
,”
Proceedings of the JSPE Spring Annual Meeting
, Tokyo, Japan, pp.
1259
1260
(in Japanese).