This work presents a direct-write technique for rapid prototyping and manufacturing of sensors onto structural and functional components for many diverse applications. The technique combines thermal spray (an additive process), which produces blanket depositions of films and coatings, with ultrafast laser micromachining (a subtractive process) to produce functional sensors. Microheaters and strain gauges have been successfully fabricated in this work to demonstrate the feasibility and advantages of the proposed technique. Electrical and thermal characterization of the sensors is also performed. With minor modifications to the pattern design and processing procedures, additional sensing structures and electronic components, for example, precision resistors and interdigitated capacitors, can be fabricated using the presented technique.

Issue Section:
Technical Papers
Keywords:
micromachining, microsensors, laser beam machining, strain sensors, heating elements, thermal spraying, strain gauges, sensitivity, spray coating techniques, pattern formation, rapid prototyping (industrial)
Topics:
Lasers, Manufacturing, Micromachining, Sensors, Sprays, Strain gages, Temperature, Coatings, Rapid prototyping, Heating
1.
Mo
,
Y. W.
,
Okawa
,
Y.
,
Tajima
,
M.
,
Nakai
,
T.
,
Yoshiike
,
N.
, and
Natukawa
,
K.
,
2001
, “
Micro-Machined Gas Sensor Array Based on Metal Film Micro-Heater
,”
Sens. Actuators B
,
79
, pp.
175
–
181
.
2.
Guidi
,
V.
,
Cardinali
,
G. C.
,
Dori
,
L.
,
Faglia
,
G.
,
Ferroni
,
M.
,
Martinelli
,
G.
,
Nelli
,
P.
, and
Sberveglieri
,
G.
,
1998
, “
Thin-Film Gas Sensor Implemented on a Low-Power-Consumption Micromachined Silicon Structure
,”
Sens. Actuators B
,
49
, pp.
88
–
92
.
3.
Pike
,
A.
, and
Gardner
,
J. W.
,
1997
, “
Thermal Modelling and Characterization of Micropower Chemoresistive Silicon Sensors
,”
Sens. Actuators B
,
45
, pp.
19
–
26
.
4.
Lei
,
J. F.
, and
Will
,
H. A.
,
1998
, “
Thin-Film Thermocouples and Strain-Gauge Technologies for Engine Applications
,”
Sens. Actuators, A
,
65
, pp.
187
–
193
.
5.
Gregory
,
O. J.
,
Slot
,
A. B.
,
Amons
,
P. S.
, and
Crisman
,
E. E.
,
1997
, “
High Temperature Strain Gages Based on Reactively Sputtered AlNx Thin Films
,”
Surf. Coat. Technol.
,
88
, pp.
79
–
89
.
6.
Dobrzanski
,
L.
, and
Piotrowski
,
J.
,
1998
, “
Micromachined Silicon Thermopile and Thermal Radiators Using Porous Silicon Technology
,”
IEE Proc.: Optoelectron.
,
145
, pp.
307
–
311
.
7.
Baltes
,
H.
,
Paul
,
O.
, and
Brand
,
O.
,
1998
, “
Micromachined Thermally Based CMOS Microsensors
,”
Proc. IEEE
,
86
, pp.
1660
–
1678
.
8.
Herman
,
H.
,
Sampath
,
S.
, and
Mccune
,
R.
,
2000
, “
Thermal Spray: Current Status and Future Trends
,”
MRS Bull.
,
25
, pp.
17
–
25
.
9.
Sampath
,
S.
, and
Mccune
,
R.
,
2000
, “
Thermal-Spray Processing of Materials
,”
MRS Bull.
,
25
, pp.
12
–
14
.
10.
Sampath
,
S.
,
Herman
,
H.
,
Shimoda
,
N.
, and
Saito
,
T.
,
1995
, “
Thermal Spray Processing of FGMs
,”
MRS Bull.
,
20
, pp.
27
–
31
.
11.
Sampath
,
S.
,
Longtin
,
J. P.
,
Gambino
,
R. J.
, and
Herman
,
H.
,
2000
, “
Direct-Write Thermal Spraying of Multilayer Electronics and Sensor Structures
,”
Mater. Res. Soc. Symp. Proc.
,
7
, pp.
714
–
717
.
12.
Fasching
,
M.
,
Prinz
,
F. B.
, and
Weiss
,
L. E.
,
1995
, “
Smart Coatings—a Technical Note
,”
J. Thermal Spray Technol.
,
4
, pp.
133
–
136
.
13.
Ba¨uerle, D., 1996, Laser Processing and Chemistry, Springer, Berlin.
14.
Liu
,
X.
,
Du
,
D.
, and
Mourou
,
G.
,
1997
, “
Laser Ablation and Micromachining With Ultrashort Laser Pulses
,”
IEEE J. Quantum Electron.
,
33
, pp.
1706
–
1716
.
15.
Nolte
,
S.
,
Momma
,
C.
,
Jacobs
,
H.
,
Tunnermann
,
A.
,
Chichkov
,
B. N.
,
Wellegehausen
,
B.
, and
Welling
,
H.
,
1997
, “
Ablation of Metals by Ultrashort Laser Pulses
,”
J. Opt. Soc. Am. B
,
14
, pp.
2716
–
2722
.
16.
Momma
,
C.
,
Chichkov
,
B. N.
,
Nolte
,
S.
,
Vonalvensleben
,
F.
,
Tunnermann
,
A.
,
Welling
,
H.
, and
Wellegehausen
,
B.
,
1996
, “
Short-Pulse Laser Ablation of Solid Targets
,”
Opt. Commun.
,
129
, pp.
134
–
142
.
17.
Chichkov
,
B. N.
,
Momma
,
C.
,
Nolte
,
S.
,
Vonalvensleben
,
F.
, and
Tunnermann
,
A.
,
1996
, “
Femtosecond, Picosecond, and Nanosecond Laser Ablation of Solids
,”
Appl. Phys. A: Mater. Sci. Process.
,
63
, pp.
109
–
115
.
18.
Pronko
,
P. P.
,
Vanrompay
,
P. A.
,
Horvath
,
C.
,
Loesel
,
F.
,
Juhasz
,
T.
,
Liu
,
X.
, and
Mourou
,
G.
,
1998
, “
Avalanche Ionization and Dielectric Breakdown in Silicon with Ultrafast Laser Pulses
,”
Phys. Rev. B
,
58
, pp.
2387
–
2390
.
19.
Perry
,
M. D.
,
Stuart
,
B. C.
,
Banks
,
P. S.
,
Feit
,
M. D.
,
Yanovsky
,
V.
, and
Rubenchik
,
A. M.
,
1999
, “
Ultrashort-Pulse Laser Machining of Dielectric Materials
,”
J. Appl. Phys.
,
85
, pp.
6803
–
6810
.
20.
Lenzner
,
M.
,
Kruger
,
J.
,
Sartania
,
S.
,
Cheng
,
Z.
,
Spielmann
,
C.
,
Mourou
,
G.
,
Kautek
,
W.
, and
Krausz
,
F.
1998
, “
Femtosecond Optical Breakdown in Dielectrics
,”
Phys. Rev. Lett.
,
80
, pp.
4076
–
4079
.
21.
Ashkenasi
,
D.
,
Varel
,
H.
,
Rosenfeld
,
A.
,
Noack
,
F.
, and
Campbell
,
E. E. B.
,
1997
, “
Pulse-Width Influence on Laser Structuring of Dielectrics
,”
Nucl. Instrum. Methods Phys. Res. B
,
122
, pp.
359
–
363
.
22.
Bor
,
Z.
,
Racz
,
B.
,
Szabo
,
G.
,
Xenakis
,
D.
,
Kalpouzos
,
C.
, and
Fotakis
,
C.
,
1995
, “
Femtosecond Transient Reflection From Polymer Surfaces During Femtosecond UV Photoablation
,”
Appl. Phys. A: Mater. Sci. Process.
,
60
, pp.
365
–
368
.
23.
Ihlemann
,
J.
,
Scholl
,
A.
,
Schmidt
,
H.
, and
Wolffrottke
,
B.
,
1995
, “
Nanosecond and Femtosecond Excimer-Laser Ablation of Oxide Ceramics
,”
Appl. Phys. A: Mater. Sci. Process.
,
60
, pp.
411
–
417
.
24.
Sun
,
J.
,
Longtin
,
J. P.
, and
Norris
,
P. M.
,
2001
, “
Ultrafast Laser Micromachining of Silica Aerogels
,”
J. Non-Cryst. Solids
,
281
, pp.
39
–
47
.
25.
Sun, J., Fan C. H., Longtin J. P., and Sampath S., 2001, “Micromachining of Vias Through Thermal-Sprayed Multilayer Structures Using Ultrafast Lasers,” Proc. 2001 ASME International Mechanical Engineering Congress and Exposition, ASME, New York, pp. 1801–1806.
26.
Sun, J., Fan, C. H., Longtin, J. P., and Sampath, S., 2001, “Laser Processing of Thermal Spray Patterns Using Femtosecond Pulses,” Proc. 35th National Heat Transfer Conference, ASME, New York, NHTC01-1823, pp. 1807–1817.
27.
Gardner, J. W., 1994, Microsensors: Principles and Applications, Wiley, New York.
28.
Dally, J. W., and Riley, W.F., 1991, Experimental Stress Analysis, McGraw-Hill, New York.
29.
Window, A. L., and Holister, G. S., 1992, Strain Gauge Technology, Elsevier, New York.
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