Low scanning speed of piezo-probes has been a fundamental limitation of scanning probe based nano-fabrication techniques. Typical scan-rates achieved are limited, by structural vibrations of the piezo-probe, to about 1/10th the fundamental vibrational frequency of the piezo-probe. Faster scanning of piezo-probes is achieved here (experimental results are presented) by using inversion of the piezo-dynamics—this approach uses a feedforward input voltage, applied to piezo-probe, to compensate for piezo vibrations.

1.
Albrecht
T. R.
,
Akamine
S.
,
Zdeblick
M. J.
, and
Quate
C. F.
,
1990
, “
Microfabrication of Integrated Scanning Tunneling Microscope
,”
J. Vac. Sci. Technol.
, Vol.
A8
, No.
1
, pp.
317
318
.
2.
Francis
B. A.
and
Wonham
W. M.
,
1976
, “
The Internal Model Principle of Control Theory
,”
Automatica
, Vol.
12
, pp.
457
465
.
3.
Barrett
R. C.
, and
Quate
C. F.
, June,
1991
, “
Optical Scan-correction System Applied to Atomic Force Microscopy
,”
Rev. Sci. Instrum.
, Vol.
62
, No.
6
, pp.
1393
1399
.
4.
Botkin
D.
,
Weiss
S.
,
Ogletree
D. F.
,
Beeman
J.
,
Salmeron
M.
, and
Chemla
D. S.
, August,
1995
, “
Design Considerations in an Ultrafast Scanning Tunneling Microscope
,”
Rev. Sci. Instrum.
, Vol.
66
, No.
8
, pp.
4130
4134
.
5.
Devasia
S.
and
Bayo
E.
,
1994
, “
Inverse Dynamics of Articulated Flexible Structures: Simultaneous Trajectory Tracking and Vibration Reduction
,”
Dynamics and Control
, Vol.
4
, No.
3
, pp.
299
310
.
6.
Devasia
S.
,
Chen
D.
, and
Paden
B.
,
1996
a, “
Nonlinear Inversion-based Output Tracking
,”
IEEE Transactions on Automatic Control
, Vol.
41
, No.
7
, pp.
930
943
.
7.
Devasia, S., Paden, B., and Rossi, C., 1996b, “Exact-Output Tracking Theory for Systems with Parameter Jumps,” International Journal of Control, Accepted.
8.
Friedland, B., 1986, Control System Design, McGraw Hill.
9.
Ge
P.
, and
Jouaneh
M.
,
1996
, “
Tracking Control of a Piezoceramic Actuator
,”
IEEE Transactions on Control Systems Technology
, Vol.
4
, No.
3
, pp.
209
216
.
10.
Griffith
J. E.
,
Miller
G. L.
, and
Green
C. A.
, Nov/Dec
1990
, “
A Scanning Tunneling Microscope With a Capacitance-Based Position Monitor
,”
J. Vac. Sci. Technology
, Vol.
B8
, No.
6
, pp.
2023
2027
.
11.
Hirschorn
R. M.
,
1979
, “
Invertibility of Multivariable Nonlinear Control System
,”
IEEE Transactions on Automatic Control
, Vol.
24
, No.
6
, pp.
855
865
.
12.
Holman
A. E.
,
Scholte
P.
,
Heerens
W. C.
, and
Tunistra
F.
, May,
1995
, “
Analysis of Piezo Actuators in Translation Constructions
,”
Rev. Sci. Instrum.
, Vol.
66
, No.
5
, pp.
3208
3215
.
13.
Huang, J., and Rugh, W. J., 1992, “An Approximation Method for the Nonlinear Servomechanism Problem,” IEEE Transactions on Automatic Control, Sept. 1395–1398.
14.
Huang
J.
,
1995
, “
Output Regulation of Nonlinear Systems With Nonhyperbolic Zero Dynamics
,”
IEEE Transactions on Automatic Control
, Vol.
40
, No.
8
, pp.
1497
1500
.
15.
Isidori
A.
, and
Byrnes
C. I.
,
1990
, “
Output Regulation of Nonlinear Systems
,”
IEEE Transactions on Automatic Control
, Vol.
35
, No.
2
, pp.
131
140
.
16.
Isidori, A., 1989, Nonlinear Control Systems: An Introduction, Springler-Verlag.
17.
Kaizuka
H.
, October,
1989
, “
Application of Capacitor Insertion Method to Scanning Tunneling Microscopes
,”
Rev. Sci. Instrum.
, Vol.
60
, No.
10
, pp.
3119
3122
.
18.
Khalil, H. K., 1991, Nonlinear Systems, Macmillan.
19.
Koops
R.
, and
Sawatzky
G. A.
, August,
1992
, “
New Scanning Device for Scanning Tunneling Microscope Applications
,”
Rev. Sci. Instrum.
, Vol.
63
, No.
8
, pp.
4008
4009
.
20.
Krener, A. J., 1992, “The Construction of Optimal Linear and Nonlinear Regulators,” Systems, Models and Feedback: Theory and Application. A. Isidori and T. J. Tarn, eds, Birkhauser, Boston.
21.
Lozanne, A. L. D., Smith, W. F., and Ehrichs, E. E., 1993, “Direct Writing With a Combined STM/SEM System,” Proceedings of NATO Advanced Workshop on Nanolithography: A Borderland between STM, EB, IB, and X-ray Lithographies, Frascati, Roma, Italy, NATO ASI Series E: Applied Science Vol. 264, pp. 159–174.
22.
Lucca, D. A., Hocken, R., Balasubramaniam, S., Rhoher, R. L., and Maggioire, C. J., 1996, “The Mechanics of Nanometric Cutting,” Proceedings of NSF Design and Manufacturing Grantees Conference, pp. 403–404.
23.
Marrian, C. R. K., Perkins, F. K., Brandow, S. L., Koloski, T. S., Dobisz, E. A., and Calvert, J. M., 1993, “Low Voltage E-beam Lithography With the Scanning Tunneling Microscope,” Proceedings of NATO Advanced Workshop on Nanolithography: A Borderland between STM, EB, IB, and X-ray Lithographies, Frascati, Roma, Italy, NATO ASI Series E: Applied Science Vol. 264, pp. 175–188.
24.
Oliva
A. I.
,
Anguiano
E.
,
Denisenko
N.
,
Aguilar
M.
, and
Pena
J. L.
,
1995
, “
Analysis of Scanning Tunneling Microscopy Feedback System
,”
Rev. Sci. Instrum.
, Vol.
66
, No.
5
, pp.
3196
3203
.
25.
Park
S.
, and
Quate
C. F.
, November,
1987
, “
Theories on the Feedback and Vibration Isolation Systems for the Scanning Tunneling Microscope
,”
Rev. Sci. Instrum.
, Vol.
58
, No.
11
, pp.
2004
2009
.
26.
Pohl
D. W.
, July,
1986
, “
Some Design Criteria in Scanning Tunneling Microscopy
,”
IBM J. Res. Dev.
, Vol.
30
, No.
4
, pp.
417
427
.
27.
Robertson, B. W., 1996, “Sub-micron Interconnects: One Step Fabrication and Repair,” Proceedings of NSF Design and Manufacturing Grantees Conference, pp. 429–430.
28.
Schafer
J.
, and
Janocha
H.
,
1995
, “
Compensation of Hysteresis in Solid-State Actuators
,”
Sensors and Actuators
, Vol.
A49
, pp.
97
102
.
29.
Scholl
D.
,
Everson
M.
,
Jaklevic
R. C.
, and
Shen
W.
,
1992
, “
Improved Scanning Tunneling Microscope Feedback Investigation of Surfaces With Micronscale Roughness
,”
Rev. Sci. Instrum.
, Vol.
63
, No.
9
, pp.
4046
4048
.
30.
Silverman
L. M.
,
1969
, “
Inversion of Multivariable Linear Systems
,”
IEEE Transactions on Automatic Control
, Vol.
14
, No.
3
, pp.
270
276
.
31.
Tamer, N., and Dahleh, M. A., 1994, “Feedback Control of Piezoelectric Tube Scanners,” Proceedings of Control and Decision Conference, Lake Buena Vista, Florida, pp. 1826–1831.
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