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Keywords: ultra-precision machining
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Proceedings Papers
Proc. ASME. LEMP2020, JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, V001T03A024, September 3, 2020
Publisher: American Society of Mechanical Engineers
Paper No: LEMP2020-8586
... and the influence of frequency and applied voltage were investigated. From the experimental results, clear differences in the surface quality of microcavity were shown according to amplitude of AC voltage and its frequency. ultra-precision machining optical microcavity electrically controlled slurry...
